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Products
- Osaka Vacuum，Ltd. Top page
- Products
- Semiconductor / Electronic components
Semiconductor / Electronic components
Semiconductor devices are manufactured by repeating processes such as film deposition, photoresist exposure, etching, and ion implantation on a wafer. Many of these processes are performed, and their results are inspected in a vacuum environment. Dry Vacuum Pumps are used for medium and low vacuum processes, and Turbo Molecular Pumps and cryo pumps are used for high vacuum processes.
For etching, vacuum pumps must have corrosion resistance to the gases used, temperature control to prevent by-product deposition, high throughput performance for large amounts of process gas, and cooling capacity for generated heat. Installation flexibility is also essential.
Our TGkine® MI-B series, TGkine® MI-R series, and TG-MI series turbo molecular pumps have high pumping speed, corrosion resistance, temperature control capability, high throughput performance, cooling capacity, and installation flexibility.
Our TG-ML series ultra-low-vibration magnetically levitated turbo molecular pumps are used in lithography or CD-SEM and TEM equipment for measuring nanofabricated structures. They are clean and have the highest low-vibration performance.
Recommended pumps
Sputtering, PVD
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
- TS series (Helical Groove Pump)
Roots Vacuum Pumps
Dry Vacuum Pumps
- EcopositiV® series ER100D / ER100DC (Energy Saving Dry Vacuum Pump)
- FR060D (Air Cooled Dry Vacuum Pump)
- DSP251 / DSP501 (Compact Dry Vacuum Pump)
Oil-sealed Rotary Vacuum Pumps
CVD, ALD
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®MI-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit with Temp. Control)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TGkine®MI-R series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-MI series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
- TS series (Helical Groove Pump)
Roots Vacuum Pumps
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
Lithography
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-ML series (Ultra Low Vibration Magnetically Levitated Turbo Molecular Pump)
Dry Vacuum Pumps
Dry Etching, ALE
Turbo Molecular Pumps
- TGkine®MI-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit with Temp. Control)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TGkine®MI-R series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-MI series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
Ion Implantation
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
Metrology, Inspection