Products

  • TGkine Series
  • Magnetically Levitated Type with Integrated Control Unit
  • Roots Vacuum Pumps

  • Oil-sealed Rotary Vacuum Pumps

  • Liquid-ring Vacuum Pumps

  • Oil Diffusion Pumps

  • Ejectors

  • Dry Vacuum Pumps

  • Vacuum Systems

  • Vacuum Equipments

Turbo Molecular Pumps

Turbo molecular pumps consist of moving and stator blades arranged on multiple levels. The figure below shows the relation between the angle and rotating direction of the blades. Gas molecules inbound from the high vacuum side enter the moving blades and try to exit in various directions. However, the angle and rotation of the blades cause the molecules to move toward the exhaust end and through the quickest path in the stator. Gas molecules that flow back from the rearmost stage through the stator hit the moving blade, sending them back to the exhaust end.

View details of exhaust theory

Turbo Molecular Pumps (Compound Molecular Pumps) Exhaust Theory

Turbo molecular pumps consist of moving and stator blades arranged on multiple levels. The figure below shows the relation between the angle and rotating direction of the blades. Gas molecules inbound from the high vacuum side enter the moving blades and try to exit in various directions. However, the angle and rotation of the blades cause the molecules to move toward the exhaust end and through the quickest path in the stator. Gas molecules that flow back from the rearmost stage through the stator hit the moving blade, sending them back to the exhaust end. The blades are angled on the front end to facilitate passage of gaseous molecules (where the difference between the flow to and from the exhaust is greater), whereas on the exhaust end, the blades are angled to hinder passage (where the ratio between the flow in the exhaust direction and against it is greater). In the area of molecular flow, the moving blade and stator perform the basic functions of the turbo molecular pump.

Osaka Vacuum added a threaded groove to the moving blade and stator blade combination. The walls of the cylindrical rotor drag the gas molecules along the threaded groove in the stator, delivering them to the back pressure side. The functionality of the threaded groove enabled us to develop a turbo molecular pump (compound molecular pump) capable of exhausting large flow volumes, particularly in medium flow ranges in addition to the molecular flow range. This expanded the operating range for turbo molecular pumps which are now used in a wide variety of applications. And its ability to operate under high back pressure has widened the choices for auxiliary pumps.

Cross-section of a turbo molecular pump (Grease Lubricated Type)

Typical Benefits of the Turbo Molecular Pump

- Provides an oil-free ultra-high vacuum.

- It features roughly the same exhaust rate for all gases in order to mechanically exhaust parentheses (dynamically exhaust) gas molecules.

- It can also exhaust noble and corrosive gases.

- It can continually exhaust large flow volumes of gas.

- Wide working pressure range (to 10-10Pa).

Any Orientation Type TG-F Series Lineup

Uses grease lubricated ball bearings for a pump that is small, lightweight, and low cost. The shock resistant design enables the turbo molecular pump to be mounted on moving equipment or moving parts. The product lineup offers models from 50 L/s to 2400 L/s.

  • TG50F

    TG50F

  • TG60F

    TG60F

  • TG70F

    TG70F

  • TG220F

    TG220F

  • TG240F

    TG240F

  • TG350F

    TG350F

  • TG450F

    TG450F

  • TG800F

    TG800F

  • TG1100F

    TG1100F

  • TG1400F

    TG1400F

  • TG2400F

    TG2400F

  • TG2410F

    TG2410F

Magnetically Levitated Type TG-M Series Lineup

The use of magnetically suspended bearings allows for a completely oil-free exhaust, any orientation installation, and longer cycles between maintenance. The product lineup offers models from 300 L/s to 3400 L/s.

  • TG397M

    TG397M

  • TG427M

    TG427M

  • TG907M

    TG907M

  • TG1307M

    TG1307M

  • TG390M

    TG390M

  • TG420M

    TG420M

  • TG900M

    TG900M

  • TG1300M

    TG1300M

  • TG2400M

    TG2400M

  • Ultra Low Vibration TG-ML Series

    Ultra Low Vibration TG-ML Series

  • Ultra High Vacuum Type TG-MU Series

    Ultra High Vacuum Type TG-MU Series

  • Energy Efficient Heated Type TG-MI series

    Energy Efficient Heated Type TG-MI series

Magnetically Levitated Type with Integrated Control Unit TGkine Series Lineup

Integrated controller/power supply. No interconnect cable/cable duct nor rack-mount needed. Causes less strain to system design. Continues our TG-M series heritage. Optimized compound rotor design offers unparalleled performances.

  • TGkine1700M/TGkine2200M

    TGkine1700M/TGkine2200M

  • TGkine3300M/TGkine3400M

    TGkine3300M/TGkine3400M

  • TGkine3800M/TGkine4200M

    TGkine3800M/TGkine4200M

  • Energy Efficient Heated type TGkine-MI series

    Energy Efficient Heated type TGkine-MI series

Oil Lubricated Type TG Series Lineup

Uses oil-lubricated ball bearings. Chemical-use models are available in every class from 200 L/s to 5500 L/s for use in applications for exhausting corrosive gases.

  • TG203

    TG203

  • TG553

    TG553

  • TG1003

    TG1003

  • TG1303

    TG1303

  • TG1810/TG1813

    TG1810/TG1813

  • TG2813

    TG2813

  • TG3213

    TG3213

  • TG3413

    TG3413

  • TG5000/TG5003

    TG5000/TG5003

  • TG5500/5503

    TG5500/5503

Turbo Molecular Pumping System

  • ST Series (TG-F series + DSP250)

    ST Series (TG-F series + DSP250)

  • ST-Compact Series

    ST-Compact Series

  • ST Series (TG-F series + Rotary Vane Pump)

    ST Series (TG-F series + Rotary Vane Pump)

Roots Vacuum Pumps

A roots vacuum pump is a vacuum pump that compresses and exhausts by rotating counter-rotating two-lobed rotors.
This mechanical vacuum pump is also referred to as a mechanical booster when it is mounted to the front end of an oil-sealed rotary vacuum pump to increase the exhaust rate.
A roots vacuum pump is normally used with a vacuum pump that can compress up to atmospheric pressure, such as a dry vacuum pump, oil-sealed rotary vacuum pump, or a liquid-ring vacuum pump.

Osaka Vacuum's Roots Vacuum Pumps

◎Osaka Vacuum's roots vacuum pumps with directly mounted motor (RD series, RA series) feature a compact footprint for easy integration into existing systems.
Our lineup also includes belt-driven large roots vacuum pumps (R series) suitable for applications requiring heavy exhaust volumes such as for oversized chambers used for aerospace testing.


◎An operating condition of the roots vacuum pump is that there be an allowable pressure difference between the inlet pressure and back pressure. Operating outside the allowable range may result in motor overloads, or excessive uncontrollable heat.
To address this, roots vacuum pump exhaust systems from Osaka Vacuum can be fitted with a relief valve to automatically adjust the pressure if it exceeds the allowable range. This enables the pump to perform at maximum exhaust capacity even in high inlet pressure ranges. (Optional)


◎Inverter control allows driving from atmospheric pressure, and pressure control at low inlet pressure levels.
Also, depending on the model and region, the speed of the pump can be increased to increase the exhaust rate by a maximum of up to 40%. (Optional)

RD series

  • RD302

    RD302

  • RD600

    RD600

  • RD1200

    RD1200

  • RD1500

    RD1500

  • RD2500/RD2510

    RD2500/RD2510

RA series

  • RA100

    RA100

R series

  • R6002

    R6002

  • R12001

    R12001

Oil-sealed Rotary Vacuum Pumps

Among the mechanical pumps capable of compressing up to atmospheric pressure, the oil-sealed rotary vacuum pump is the most economical and easiest to handle. It is suitable for a wide range of applications and therefore can be found in many applications around the world.

Osaka Vacuum's Oil-sealed Rotary Vacuum Pumps Lineup

◎Oil-sealed rotary vacuum pumps are categorized by the mechanism employed: oscillating piston type (Kinney), Rotary vane type (Gaede), cam type (Senco), etc.
Osaka Vacuum's oscillating piston is durable and structurally allows for a large intake space. This construction enables efficient exhaust, making it ideal for large pumps.


◎Pump oil is vital for safe operation of the pump.
Osaka Vacuum's oil-sealed rotary vacuum pumps can be operated under harsh operating conditions such as continuous operation in low vacuum ranges, and repeated short-term cycles at atmospheric pressure and vacuum. These pumps provide a long reliable lifetime when equipped with an appropriate oil supply mechanism.


◎This pump features a precision, robust design, and an easy-to-maintain construction that has been reported to last 20 to 30 years in the field with proper maintenance.

P series

  • P90

    P90

  • P180

    P180

  • P222

    P222

  • P450

    P450

  • P600

    P600

  • P901

    P901

K series

  • K30002

    K30002

EcopositiV series

  • EP450

    EP450

Liquid-ring Vacuum Pumps

A liquid ring vacuum pump can compress up to atmospheric pressure using water or the process liquid as the sealing liquid.
Also referred to as a water seal vacuum pump because water is commonly used as the sealing liquid which enables the pump to attain ultimate pressures near the vapor pressure of the sealing liquid.

[ Exhaust Theory of Liquid-ring Vacuum Pumps ]
A liquid ring vacuum pump is constructed from a casing having an integral impeller. The casing is filled with the sealing liquid and the impeller starts rotating, thus creating centrifugal force that pushes sealing liquid against the casing wall to form a liquid ring. This results in a series of spaces between the blades on the impeller and the liquid ring which, due to the impeller being mounted eccentrically to the casing, varies as the impeller rotates. This volumetric change is used to cycle through intake, compression, and exhaust.

Osaka Vacuum's Liquid-ring Vacuum Pumps (Water Sealed Vacuum Pumps)

Osaka Vacuum's liquid-ring vacuum pumps are available with various sealing liquids, including water. Users can select the sealing liquid best suited for their application, allowing use in exhaust applications for gases (condensable gases) including water vapors and organic solvents.
Recycling the liquid ring in a closed system minimizes waste liquid.

Additionally, the liquid ring vacuum pump can be used with other pumps to meet a variety of processes. For example, the liquid ring vacuum pump can be used with a Roots pump to attain high exhaust and high vacuum using less energy. (PRL series)
Also, an air ejector can be added to improve the ultimate pressure, and prevent cavitation. (1-stage air ejector: WA series; 2-stage air ejector: WB series)

W series

  • W30S

    W30S

  • W50S/WA50S

    W50S/WA50S

  • W80S/WA80S

    W80S/WA80S

  • W150S/WA150S

    W150S/WA150S

  • W310S/WA310S/WB310S

    W310S/WA310S/WB310S

  • W630S/WA630S/WB630S

    W630S/WA630S/WB630S

Oil Diffusion Pumps

■ Oil diffusion pumps attain ultra-high vacuum, and are used as the exhaust system for a wide variety of vacuum processes such as vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering equipment.

■ We also offer pumps with an exhaust rate of 10,000L/sec (without baffles) or higher.

■ This is a highly reliable ultra-high vacuum pump with little pressure fluctuation even from bumping in the hydraulic oil.

■ It uses no mechanical moving parts for a robust, long lifetime.

■ Easy to disassemble design simplifies internal cleaning and inspection work.

Construction and operating principle

As shown on the figure, the oil diffusion pump construction consists of a boiler, multi stage jet assembly, and a cylinder with no mechanical moving mechanism. The working oil is heated in the boiler, vaporized and streams out of each stage of the jet stack at supersonic speed. Gases on the high vacuum (inlet) side of the pump are captured in the jet vapor by diffusion, and are carried from upper to the lower jet stages which compresses them in the process. These pumped gasses are then exhausted through the outlet port to the backing pump (ex. Oil-sealed Rotary Vacuum Pump). The vapor stream from the jet stack is cooled and condensed on the inner walls of pump body, and returned to the boiler. By repetition of this process, evacuation is accomplished. The weir plate provided in the boiler permits return and recirculation of the working fluid, allowing the fractional distillation of the fluid to be a continuous process.

Oil Diffusion Pumps

  • Oil Diffusion Pumps

    Oil Diffusion Pumps

Ejectors

An ejector is a vacuum pump that does not have any mechanical drive parts. Instead, it is driven by injected steam or similar mediums.
It has a simple construction for virtually trouble-free operation. And it is easy to be manufactured for large volume rate. Ejectors are used in a variety of applications including degassing equipment for molten steel.
Standalone ejectors can compress up to atmospheric pressure, and can be used in series to attain even higher vacuum pressure. They can be used with other vacuum pumps to build a vacuum system.

Ejectors

  • Ejectors

    Ejectors

Dry Vacuum Pumps

Osaka Vacuum offer the dry vacuum pumps as follows.

Air-cooled series

  • * Enable operation from atmospheric pressure.

  • * Enable hangding water vapor.

  • * Reducing evacuation time.

  • * Air cooling.

  • Air-cooled Dry Vacuum Pump FR060D

    Air-cooled Dry Vacuum Pump FR060D

EcopositiV series

  • * Energy-saving.

  • * Compact size.

  • * Clean exhaust.

  • * Exhaust of corrosive gases.

  • * Rotational speed control.

  • Energy-saving Dry Vacuum Pump ER100D/ER100DC

    Energy-saving Dry Vacuum Pump ER100D/ER100DC

Compact series

  • * Clean exhaust.

  • * Air cooling.

  • * Gas ballast equipped.

  • * Oil free.

  • * Quick pump down.

  • * Law cost.

  • * Compact size.

  • * Energy conservation.

  • Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500

    Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500

 

Vacuum Systems

A vacuum system is a system capable of creating the desired vacuum environment by combining various vacuum pumps.
Vacuums are used in wide variety of applications, from state-of-the-art scientific applications to general-purpose industrial applications. The vacuum requirements differ for each application.

Vacuum pumps each have various features which can be combined to overcome various conditions.

Osaka Vacuum's Efforts for Vacuum Systems

Our motto at Osaka Vacuum is "Providing Customers with Reliable and Durable Products that Ensure Safety and Satisfaction". Our extensive product lineup enables us to provide the vacuum system that best suits the customer's needs with technical expertise and proven results.

Vacuum System Using a Turbo Molecular Pump.

  • Used with Oil-sealed Rotary Vacuum Pumps

    Vacuum System Using a Turbo Molecular Pump.

    A system that combines an oil-sealed rotary vacuum pump, as a backing pump, with a ball bearing type turbo molecular pump attains ultra-high vacuum at low-cost.

  • Used with Dry Vacuum Pumps

    Used with Dry Vacuum Pumps

    Integrating the dry vacuum pump, as a backing vacuum pump for the magnetically suspended bearing type turbo molecular pump, attains an oil-free and clean ultra-high vacuum.

  • Tandem Turbo Molecular Pumps

    Tandem Turbo Molecular Pumps

    A tandem system has TMP used as a backing pump of TMP which can attain XHV. The system is used to obtain high exhaust rate of hydrogen at extremely high vacuum ranges, and attain a stabler vacuum.

  • Used with the Getter Pump and Other Models

    Used with the Getter Pump and Other Models

    Integrating a turbo molecular pump with an ultra-high vacuum pump such as an ion pump, Getter pump, or non-evaporating type Getter pump (NEG pump), offers an easy means for exhausting various gases under ultra-high vacuums, and makes the ultra-high vacuum more stable.

Vacuum System Using a Dry Vacuum Pump.

  • Used with Roots Vacuum Pumps (Mechanical Booster)

    Used with Roots Vacuum Pumps (Mechanical Booster)

    This environmentally compatible vacuum system is completely oil-free and strong against corrosive gases.

  • Used with Roots Vacuum Pumps on 2-stages

    Used with Roots Vacuum Pumps on 2-stages

    This is an environmentally friendly vacuum system that obtains high vacuum by combining two roots vacuum pumps.

  • Used with Ejectors

    Used with Ejectors

    This is an oil-free environmentally friendly vacuum system that uses an ejector suitable for heavy volume exhaust, and a dry vacuum pump.

Vacuum System Using an Oil-sealed Rotary Vacuum Pump.

  • Used with Roots Vacuum Pumps

    Used with Roots Vacuum Pumps

    Capable of efficiently exhausting large capacities with proven results in heat treating equipment and welding equipment.

  • Used with Roots Vacuum Pumps on 2-stages

    Used with Roots Vacuum Pumps on 2-stages

    This is a vacuum system that obtains a high vacuum by combining two roots vacuum pumps.

Vacuum System Using a Liquid-ring Vacuum Pump

  • Used with Roots Vacuum Pumps

    Used with Roots Vacuum Pumps

    Strong against condensable gas, and has been used in processes for vacuum drying and vacuum distillation.

  • Used with Roots Vacuum Pumps on 2-stages

    Used with Roots Vacuum Pumps on 2-stages

    These systems obtain a high vacuum by combining two or more roots vacuum pumps. Many such systems are in use for products such as in dryers.

  • Used with Ejectors

    Used with Ejectors

    This is an environmentally friendly vacuum system that combines ejectors which are suitable for heavy exhaust volumes and a liquid-ring vacuum pump which adopts a closed-cycle system. Various conditions can be met by changing the number of ejectors, and by adding or removing a roots pump.

Vacuum System Using a Roots Vacuum Pump

  • Used with Oil-sealed Rotary Vacuum Pumps

    Used with Oil-sealed Rotary Vacuum Pumps

    Capable of efficiently exhausting large capacities with proven results in heat treating equipment and welding equipment.

  • Two-stage System Using an Oil-sealed Rotary Vacuum Pump and Roots Vacuum Pump

    Two-stage System Using an Oil-sealed Rotary Vacuum Pump and Roots Vacuum Pump

    This is an environmentally friendly vacuum system that obtains a high vacuum by combining two roots vacuum pumps.

  • Used with Liquid-ring Vacuum Pumps

    Used with Liquid-ring Vacuum Pumps

    Strong against condensable gas, and has been used in processes for vacuum drying and vacuum distillation.

  • Two-stage System Using a Liquid-ring Vacuum Pump and Roots Vacuum Pump

    Two-stage System Using a Liquid-ring Vacuum Pump and Roots Vacuum Pump

    These systems obtain a high vacuum by combining two or more roots vacuum pumps. Many such systems are in use for products such as in dryers.

  • Used with Dry Vacuum Pumps

    Used with Dry Vacuum Pumps

    This environmentally compatible vacuum system is completely oil-free and strong against corrosive gases.

  • Two-stage System Using a Dry Vacuum Pump and Roots Vacuum Pump

    Two-stage System Using a Dry Vacuum Pump and Roots Vacuum Pump

    This is an environmentally friendly vacuum system that obtains a high vacuum by combining two roots vacuum pumps.

  • Ejectors with Liquid-ring Vacuum Pumps

    Ejectors with Liquid-ring Vacuum Pumps

    This is an environmentally friendly vacuum system that combines ejectors which are suitable for heavy exhaust volumes and a liquid-ring vacuum pump which adopts a closed-cycle system. Various conditions can be met by changing the number of ejectors, and by adding or removing a roots pump.

Vacuum System Using an Ejector.

Ejectors are designed to meet specifications to handle utilities efficiently such as drive steam and cooling water. Specify the conditions listed below when inquiring.

- Operating inlet pressure and type of suction gas (specify molecular mass and characteristics if possible) and volume.

- inlet gas temperature and type of drive source, pressure and cooling water temperature.

- Preferred condenser model, initial exhaust time for the target exhaust capacity.

  • Used with Liquid-ring Vacuum Pumps

    Used with Liquid-ring Vacuum Pumps

    This is an environmentally friendly vacuum system that combines ejectors which are suitable for heavy exhaust volumes and a liquid-ring vacuum pump which adopts a closed-cycle system. Various conditions can be met by changing the number of ejectors, and by adding or removing a roots pump.

  • Used with Dry Vacuum Pumps

    Used with Dry Vacuum Pumps

    This is an oil-free environmentally friendly vacuum system that uses an ejector suitable for heavy volume exhaust, and a dry vacuum pump.

  • 4-stage Ejector Based on a 2-stage Booster

    4-stage Ejector Based on a 2-stage Booster

    It is ideal for heavy exhaust applications such as for degassing, with the ability to change the number of stages according to the inlet pressure. Application-specific designs are also possible by selecting from various anti-corrosive materials.

Vacuum Equipments

Osaka Vacuum started with the development of turbo molecular pumps and has progressed further into the clean high-vacuum industry including physical and chemical research applications, as well as the semiconductor and LCD industry. Our efforts are directed at providing customers with systems that are easy to use and highly productive. Every device we deliver fully reflects the needs of our customers.

  • ■Sputtering equipment

  • ■Vacuum evaporation equipment

  • ■Vacuum exhaust equipment

  • ■Thin-film coating machine

  • ■FPD manufacturing

  • ■Vacuum environment testing equipment

  • Etching equipment

  • V cathode sputtering equipment

  • Plasma generator

  • Cylindrical magnetron sputtering equipment

  • Laser ablation equipment