Products

Energy Efficient Heated type TGkine-MI series

  • Energy Efficient Heated type TGkine-MI series
  • Energy Efficient Heated type TGkine-MI series

The TG-MI series is designed to reduce the condensation rate of build-up
inside Turbo molecular pump (TMP). Osaka's patented thermal insulation
structure with Temperature management system (TMS) made effective.

 

■ Our Energy Efficient solution to the process by-product built up inside the TMP

- Combining the heat generated by the fast speed TMP rotor and built-in TMS(Temperature Management System), temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time & elongated MTBS(mean time between service)!
- Our patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the TMP where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up.
- Improved pump life cycle & reduced frequency of pump maintenance requirement - Increased system uptime.

 

■ Our TGkine-MI breakthrough - Energy Efficient Theraml Insulated Structure

- Our patented Thermal Insulated Structure preserves and redistributes the heat of compression generated by the fast speed rotor to the specific hoto spots inside the TMP, preventing by-product condensation during process operation.
- Combining with the built-in TMS, Energy Conservation is achieved comparing to the standard method of direct TMS.
- Improved heat transfer allowing users to efficiently to maintain the pump "inside" temperature up to 90℃ - a dramatic process versatility improvement.

Application

Semiconductor processes, LCD/TFT/MEMS manufacturing tools.


Specifications

Model
TGkine2200MI
TGkine3300MI
TGkine3400MI
Inlet flange
ISO-B250
ISO-B320/VG300
VG350
Volume flow rate
N2(L/s)
2200
3300
N2
(with protective screen)
(L/s)
2100
3100
H2(L/s)
1800
2700
Max. compression ratio
N2
> 2×108
> 1×108
H2
3×103
Base pressure
 (Pa/Torr)
< 2×10-7/1.5×10-9
Max. throughput *1
N2(sccm)
5000
2500
Ar(sccm)
2600
1800
Startup time (min)
≦10
≦11
Shutdown time (min)
≦10
≦13
Max. backing pressure
(Pa/Torr)
100
100
110
(Torr)
0.75
0.75
0.82
Recommended backing vacuum pump (L/min)
≧2000
Weight (kg)
65
73/74
76

*1 : In case of the backing vacuum pump of 5000L/min.

Drawing of outside dimensions

Drawing of outside dimensions


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Performance curve

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