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Energy Efficient Heated type TGkineMI-B series

  • Energy Efficient Heated type TGkineMI-B series

The TGkineMI-B series is designed to reduce the condensation rate of build-up inside Turbo molecular pump (TMP). Osaka's patented thermal insulation structure with Temperature management system (TMS) made effective.

 

  • Our Energy Efficient solution to the process by-product built up inside the TMP

- Combining the heat generated by the fast speed TMP rotor and built-in TMS(Temperature Management System), temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time & elongated MTBS(mean time between service)!

- Our patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the TMP where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up.

- Improved pump life cycle & reduced frequency of pump maintenance requirement - Increased system uptime.

 

■ Our TGkine-MI breakthrough - Energy Efficient Theraml Insulated Structure

- Our patented Thermal Insulated Structure preserves and redistributes the heat of compression generated by the fast speed rotor to the specific hoto spots inside the TMP, preventing by-product condensation during process operation.
- Combining with the built-in TMS, Energy Conservation is achieved comparing to the standard method of direct TMS.
- Improved heat transfer allowing users to efficiently to maintain the pump "inside" temperature up to 90℃ - a dramatic process versatility improvement.

 

Application

  • Semiconductor processes
  • LCD/TFT/MEMS manufacturing tools

Specifications

Drawing of outside dimensions

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Performance curve

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