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- Magnetically Levitated Type TG-M Series
Magnetically Levitated Type TG-M Series
The use of magnetically suspended bearings allows for a completely oil-free exhaust, any orientation installation, and longer cycles between maintenance. The product lineup offers models from 300 L/s to 3400 L/s.
Cross-section of Magnetic levitated type turbo molecular pumps
Product Lineup
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TG390M
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TG420M
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TG900M
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TG1300M
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TG2400M
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Ultra Low Vibration TG-ML Series
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Ultra High Vacuum Type TG-MU Series
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Radiation-hardened Type TG-MR series
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Energy Efficient Heated Type TG-MI series