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Oil Lubricated Type TG Series

Uses oil-lubricated ball bearings. Chemical-use models are available in every class from 200 L/s to 5500 L/s for use in applications for exhausting corrosive gases.

Cross-section of Oil lubricated ball bearing type turbo molecular pumps

ターボ分子ポンプ断面図(油潤滑玉軸受タイプ)

Product Lineup

  • TG203

    TG203

  • TG553

    TG553

  • TG1003

    TG1003

  • TG1303

    TG1303

  • TG1810/TG1813

    TG1810/TG1813

  • TG2813

    TG2813

  • TG3213

    TG3213

  • TG3413

    TG3413

  • TG5000/TG5003

    TG5000/TG5003

  • TG5500/5503

    TG5500/5503