Oil Diffusion Pumps
Structure and operating principle
As shown in the figure, the oil diffusion pump consists of a boiler, a multi-stage jet assembly, and a cylinder with no mechanical moving parts. The working oil is heated in the boiler, vaporized, and streams out of each stage of the jet stack at supersonic speed. Gases on the high vacuum (inlet) side of the pump are captured in the jet vapor, and are carried from the upper to the lower jet stages, which compresses them in the process. These pumped gases are then exhausted through the outlet port to the backing pump. The vapor stream from the jet stack cools and condenses on the inner walls of the cylinder, then returns to the boiler. A diffusion pump can’t compress to the atmospheric pressure. It requires a backing pump (ex. an oil-sealed rotary vacuum pump).
Features
With an oil diffusion pump, an ultra-high vacuum can easily be achieved. This pump is used for a wide range of processes, including vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering.
The lineup includes a pump with a pumping speed of over 10,000 L/s (without a baffle).
The pump is highly reliable with little pressure fluctuation from eruptive boiling of the working oil.
The pump has no mechanical moving parts, making it robust and long-lasting.
The pump’s simple, easy-to-disassemble structure makes cleaning and maintenance simple.
Industrial fields
- Optical Industry
- Automotive / Aviation
- Material
- Metal and Steel
- Energy
- Aerospace / R & D
- Machinery
