History
Company history
Product history
1950
1950
Osaka Vacuum, Ltd. was established in Osaka.
Opened Osaka Factory.
Started manufacturing
Oil-sealed Rotary Vacuum Pumps.
1959
Started manufacturing
Roots Vacuum Pumps.
1962
Opened Sakai Factory.
1967
Manufactured the Japan’s first large-scale steam ejector for degassing of large-volume molten steel.
Released world's largest oil-sealed rotary vacuum pump, "K30000".
1969
Awarded the medium and small business research institute award.
1971
Launched Turbo Molecular Pump (TMP)
“T650A” as the First TMP designed/produced in Japan
1972
Opened Hachioji Factory.
1974
Delivered the rough vacuum equipment for space chamber for Japan Aerospace Exploration Agency (JAXA), formerly known as National Space Development Agency.
1976
Received the 1st Vacuum Technology Award for production of the First TMP in Japan.
1977
Delivered four TH5000 turbo molecular pumps to evacuate the accelerator in Riken.
* Since 2001, the project team led by Kosuke Morita (Associate Chief Scientist) has been conducting experiments with super heavy elements. In 2004, 2005 and 2012, the team succeeded in discovering the new element No.113.
* Since 2001, the project team led by Kosuke Morita (Associate Chief Scientist) has been conducting experiments with super heavy elements. In 2004, 2005 and 2012, the team succeeded in discovering the new element No.113.
1980
Manufactured the largest steam Ejector for degassing (I.D. 2m) in Japan.
Delivered Space simulation chamber to National Institute of Advanced Industrial Science and Technology formerly known as Electro Technical Laboratory.
1981
Delivered the Large Scale Cryo Panel for the "Heliotron E" plasma experimental equipment in Kyoto University.
1982
Manufactured a Vacuum System for the Experimental Nuclear Fusion Reactor, JT60, for the Japan Atomic Energy Research Institute.
Started manufacturing Facing Target Sputtering Equipment.
1983
Launched Compound Turbo Molecular Pump (TMP) "TG550" and the series as the First Compound TMP designed/produced in the world.
1985
1985
Received the 10th Vacuum
Technology Award for development
of the compound Turbo Molecular Pump.
Completed development of Maglev Turbo Molecular Pump (TMP) “TG600M” and launched Maglev TMP “TG-M” series.
1986
Received the JSME Medal for
New Technology for development of
the compound Turbo Molecular Pump.
1988
Opened Nabari Factory
1989
1989
Received the Prize of Science and Technology Agency's Director for the achievements in the vacuum industry
Completed development of Sputtering Equipment for Eyeglasses Frame.
1990
Completed development of the world's largest TMP "TH25000".
1991
Established California Office in San Jose, CA, USA
Received the Medal with Blue Ribbon for the achievements in the vacuum industry
1993
Completed development of
the High Vacuum Helical Groove
TMP “TS440”.
Delivered TMP for exhausting to the main equipment of "SPring-8".
1994
Developed and manufactured Maglev Extreme High Vacuum TMP “TG1121MC”, reaching 10-10Pa(10-12torr).
1995
Received the 20th Vacuum Technology Award for development of Maglev Extreme High Vacuum TMP .
1996
Started repair/service support of TMP in Taiwan by Cutes Corporation.
Opened Seoul Office in Seoul, Korea.
1997
Nabari Factory received ISO9002 certification.
(Updated to ISO9001)
1998
1998
Started repair/service support of TMP in Korea by Shin Won Precision Co.
(Shin Won Tech. Co, Ltd. Korea at present)
Hachioji Factory received ISO9001 certification.
Completed development of Dry Vacuum Pump "DSP80".
1999
Launched "TG-F" series TMP mountable in any orientation.
2000
The 50th anniversary of the establishment.
2001
2001
Established Shanghai Osaka Vacuum, Ltd.
in Shanghai, China.
Launched heated type Maglev TMP “TG-MI” series.
2002
2002
Opened the Shanghai Office.
Launched the Full-digital type Maglev TMP.
2003
Sakai Factory received ISO9001 certification.
2004
2004
Relocated Seoul office to Seongnam city.
Launched Ultra-Low Vibration Maglev TMP “TG-ML” series.
2005
Established Osaka Vacuum U.S.A., Inc.
(California, USA)
* Abolish California office simultaneously.
Shanghai Osaka Vacuum received ISO9001 certification.
(0105Q14285R0S/3100)
2006
2006
Received ISO14001 certification.
Launched Ultra-high Vacuum Maglev TMP “TG-MU” series.
Launched Radiation resistant type Maglev TMP “TG-MR” series.
Completed development of Laser ablation equipment
2007
2007
Formed an alliance with Shikoku Taiyo Nippon Sanso., Ltd. for sales and consignment operation.
Launched TMP ‘TG70F’ for
analytical and measurement systems.
2008
Launched TMP “TG240F” for
analytical and measurement systems.
Delivered Cylindrical magnetron
sputtering equipment to Nagoya University.
2009
Launched Compact Dry Vacuum Pump
“DSP” series.
2010
2010
Formed an alliance with three companies
(Azuma Technos Co., Ltd., Kyusyu Keisokki Co., Ltd.
and Todoroki Sangyo Co., Ltd.) for sales.
Completed in-house development
of magnetic levitated bearing.
2011
2011
Formed an alliance with HI-TECH VACUUM SERVICES (M) SDN.BHD. for repair and maintenance.
Formed an alliance with Ebara Technologies Inc. (ETI) for repair and maintenance of Turbo molecule pumps.
Launched Maglev TMP with Integrated
Control Unit “TGkine2200M-B”.
Launched Energy Saving Dry Vacuum Pumps
“ER100D/ER100DC”.
2012
Launched Maglev TMP with Integrated
Control Unit “TGkine3300M-B”.
2013
Launched Air Cooled Dry Vacuum Pump “FR060D”.
2014
Formed an alliance with FMG Enterprises, Inc.
(California, USA) for repair and
maintenance of low and medium vacuum pumps.
2015
Relocated Hachioji factory to Nabari factory and
unified Repair and Maintenance Service Sections.
Formed an alliance with HI-TECH VACUUM SERVICES
(THAILAND) CO., LTD. for repair and maintenance.
OSAKA VACUUM got a gold prize as one of the best companies for 13th International Vacuum Exhibition in Beijing.
2016
2016
Launched Maglev TMP with Integrated Control Unit “TGkine4200M-B”.
Launched Compact Dry Vacuum Pump “DSP-50”.
Completed a vacuum chamber for artificial meteors.
2017
2017
Agency agreement with Ebara Precision Machinery Europe GmbH (EPME) for repair/service support of TMP.
SEMI China Equipment and Materials Committee visited our Nabari factory.
Complete development of motor coil impregnation equipment for ITER.
Completed development of the latest model space chamber.
2018
2018
Osaka Vacuum appeared in the South China Morning Post.
Completed establishment of a new machining plant in our Nabari factory.
Completed redesigning our website
Joint Study with High Energy Accelerator Research Organization (KEK)to improve the pump down performance by Pd or Pd/Ti coating.
Launched Direct Drive Oil Sealed Rotary
Vane Pump (Dual Stage) “VRD” series.
2019
2019
Launched Compact Dry Vacuum Pump “DSP NEW SERIES”.
Launched separated controller type variant "TGkine®-R" in TGkine® Maglev TMP range.
2020
2020
The 70th anniversary of the establishment.
Osaka Vacuum appeared in the South China Morning Post.
Launched “VRD-M series“ direct drive oil sealed dual stage rotary vane pumps for plasma sterilization system.
Delivered load-lock sputtering system to Osaka Research Institute of Industrial Science and Technology.
Completed the latest model of Facing Target Sputtering system.
2021
2021
Launched direct drive oil sealed single stage rotary vane pumps “VSV series”.
Launched a brand new vacuum component products as a part of package-selling.
Launched “Explosion-proof VRD series“ direct drive oil sealed dual stage rotary vane pumps.
2022
2022
Osaka Vacuum appeared in the Newsweek International Magazine.