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We have developed three world’s first vacuum products.

  • Compound Turbo Molecular Pump
  • The world's largest Turbo Molecular Pump TH25000
  • Extreme High Vacuum Magnetically Levitated Compound Turbo Molecular Pump
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Industry
  • Semiconductor devices
  • Electronic components
  • Electrical machinery
  • Home appliances
  • Electric power
  • Metal and Steel
  • Chemicals
  • Pharmaceuticals
  • Food
  • Automotive and Transportation
  • Machine tools
  • Ornament
  • Electron microscope
  • Social environment analysis
  • R & D
  • Analysis and Measurement
Application
  • Film deposition
  • Etching
  • Photographic exposure
  • Surface reforming
  • Surface cleaning
  • Vacuum filling
  • Degassing
  • Vacuum cooling
  • Vacuum drying
  • Vacuum bonding and laminating
  • Vacuum packaging
  • Vacuum suction conveying
  • Polymerization
  • Heat treatment
  • Thermonuclear fusion and Accelerators
  • Extreme high vacuum
Industry and technology for the future
  • IoT
  • AI
  • Socio-environmental systems
  • Alternative energy
  • Space exploration
INFORMATION