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We have developed three world’s first vacuum products.
- Compound Turbo Molecular Pump
- The world's largest Turbo Molecular Pump
TH25000
- Extreme High Vacuum Magnetically Levitated Compound Turbo Molecular Pump
Industry
- Semiconductor devices
- Electronic components
- Electrical machinery
- Home appliances
- Electric power
- Metal and Steel
- Chemicals
- Pharmaceuticals
- Food
- Automotive and Transportation
- Machine tools
- Ornament
- Electron microscope
- Social environment analysis
- R & D
- Analysis and Measurement
Application
- Film deposition
- Etching
- Photographic exposure
- Surface reforming
- Surface cleaning
- Vacuum filling
- Degassing
- Vacuum cooling
- Vacuum drying
- Vacuum bonding and laminating
- Vacuum packaging
- Vacuum suction conveying
- Polymerization
- Heat treatment
- Thermonuclear fusion and Accelerators
- Extreme high vacuum
Industry and technology for the future
- IoT
- AI
- Socio-environmental systems
- Alternative energy
- Space exploration