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- Turbo Molecular Pumps
- Ultra Low Vibration TG-ML Series
Ultra Low Vibration TG-ML Series
- Less than 1nm(o-p) measured by Radial & Axial acceleration.
- Advanced vibration cancellation algorithm eliminates the unwanted vibration amplitude resulted from the constant acceleration of the fast speed rotor.
- Coupled with external dampers, Super Ultra Low at less than 0.1 nm(o-p) can be realized with the TG-ML Series.
Application
- Ultra High Resolution Electron Microscopy, Analytical Instruments, R＆Ds
- E-Beam Lithography, EUV, XPS,CD linewidth tool, SEM/TEM
Specifications
Drawing of outside dimensions
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Performance curve
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Controller
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