Products

Ultra Low Vibration TG-ML Series

  • Ultra Low Vibration TG-ML Series

- Less than 1nm(o-p) measured by Radial & Axial acceleration.

- Advanced vibration cancellation algorithm eliminates the unwanted vibration amplitude resulted from the constant acceleration of the fast speed rotor.

- Coupled with external dampers, Super Ultra Low at less than 0.1 nm(o-p) can be realized with the TG-ML Series.

Application

- Ultra High Resolution Electron Microscopy, Analytical Instruments, R&Ds

- E-Beam Lithography, EUV, XPS,CD linewidth tool, SEM/TEM


Specifications

 
TG390ML
TG420ML
TG900ML
TG1300ML
Inlet flange
VG100
CF100
ISO-B100
VG150
CF160
ISO-B160
VG150
CF160
ISO-B160
VG200
CF200
ISO-B200
Volume flow rate
N2 (L/s)
340
400
900
1300
N2
(with protective
screen) (L/s)
320
370
860
1230
H2 (L/s)
290
300
1050
1200
Max. compression ratio
N2
1×108
H2
4.5×103
1.5×104
Base pressure
(Pa/Torr)
< 1×10-6/< 1×10-7
Max. throughput※1 
N2(sccm)
< 7.5×10-9/< 7.5×10-10
Startup time (min)
2-3
4-5
Shutdown time (min)
4-5
Max. backing pressure
(Pa/Torr)
400 / 3
500 / 3.8
Recommended backing vacuum 
pump (L/min)
≧160
≧250
Weight (kg)
14/17
34/42
Controller
TC010MA

 

Drawing of outside dimensions

Drawing of outside dimensions


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Performance curve

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Controller

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