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Products
Energy
In the manufacturing process of certain types of solar cells, light-absorbing layers, functional films, etc., are deposited in a vacuum. Our TGkine®-B series and TGkine®-R series magnetically levitated turbo molecular pumps satisfy high pumping speed and throughput.
In the manufacturing of lithium-ion batteries, materials are mixed, dried, and the electrolyte is filled in a vacuum environment. In these processes, dry vacuum pumps resistant to the used chemicals or Vacuum Pumping Systems which are combined with an oil-sealed rotary vacuum pump and a roots vacuum pump are used.
In transporting or storing liquefied natural gas or hydrogen, vacuum-insulated tanks maintain cryogenic conditions suitable for the liquefied gases. A vacuum pump keeps the vacuum insulation layer of the vessel at a certain pressure. We can offer reliable pump systems with our Turbo Molecular Pumps, Oil Diffusion Pumps, and P series oil-sealed rotary piston pumps that pump down the vacuum layer of large vessels over long periods.
A fusion reactor has a vacuum vessel to contain the plasma. When turbo molecular pumps are used at the vessel, the pumps require magnetic shielding, and the controllers must be installed at a distance. We have a lineup of turbo molecular pumps with integrated magnetic shields to meet these requirements.
Recommended pumps
Sputtering
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®MI-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit with Temp. Control)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TGkine®MI-R series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-MI series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
Oil Diffusion Pumps
Dry Vacuum Pumps
- EcopositiV® series ER100D / ER100DC (Energy Saving Dry Vacuum Pump)
- FR060D (Air Cooled Dry Vacuum Pump)
Oil-sealed Rotary Vacuum Pumps
Vacuum Drying
Roots Vacuum Pumps
Dry Vacuum Pumps
- EcopositiV® series ER100D / ER100DC (Energy Saving Dry Vacuum Pump)
- FR060D (Air Cooled Dry Vacuum Pump)
Oil-sealed Rotary Vacuum Pumps
- P series (Belt Drive, Kinney type）
- K30002 (Belt Drive, Kinney type)
- VSV series (Direct Drive, Single Stage Rotary Vane type)
Liquid-ring Vacuum Pumps
Ejectors
Condensation
Nuclear Fusion
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-ML series (Ultra Low Vibration Magnetically Levitated Turbo Molecular Pump)
- TG-MR series Radiation Hardened Magnetically Levitated Turbo Molecular Pump）
- TG-MU series (Ultra High Vacuum Magnetically Levitated Turbo Molecular Pump)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
- TS series (Helical Groove Pump)
- Turbo Molecular Pumping System
Oil Diffusion Pumps
Roots Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps