Dry Vacuum Pumps

Dry vacuum pumps are positive displacement vacuum pumps that do not use oil or liquid to seal their pumping chambers.
Dry vacuum pumps are used in industries such as semiconductors, electronic components, flat panel displays (FPD), pharmaceuticals, and food, where they are essential for better yield and good serviceability.
Dry vacuum pumps are classified by their rotor types: multi-stage roots, screw, scroll, claw, etc.

List of Dry Vacuum Pumps

DSP SERIES
- Compact Dry Screw Vacuum Pumps
ER SERIES
- Energy-saving, Multi-stage Roots Vacuum Pumps
FR SERIES
- Air-cooled Multi-stage Roots Vacuum Pumps

DSP SERIES

Compact Dry Screw Vacuum Pumps

A pair of opposed, synchronously rotating screws with little clearance between the rotors and the casing, transfers and compresses volumes filled with gas from the inlet to the outlet along the screw axes.
The timing gearless design eliminates the need for oil maintenance.
The pump achieves 0.5 Pa base pressure with a booster stage.

Point

Portable → Small, light-weight by the timing gearless design, shock tolerant
Versatile → The gas ballast is standard and air-cooled, so no cooling water is required.
No lubricating oil → It’s timing gearless, so there’s no lubricating oil.
Low Noise → There is no sound from the timing gears. The cover dampens the sound of the pump.
Low Vibration → The screw type rotor generates no pulsation.
Energy Efficient → Low power consumption design.
Clean Vacuum → No oil or particle back-streaming to the chamber.
High-Speed Pump Down → Large pumping speed near atmospheric pressure with the bypass line.
International Standard → CE, SEMI, NRTL certified.

Industrial fields

Semiconductor / Electronic components
Laboratory instruments
Medical / Pharmaceuticals
Aerospace / R & D
Transport

Product Lineup

ER SERIES

Energy-saving, Multi-stage Roots Vacuum Pumps

The ER Series is one of the world’s most energy-efficient and compact dry pumps thanks to its unique rotor design and idling function. With corrosion-resistant options available, the ER series can operate for a wide range of applications, from light processes, such as load locks and SEMs, to corrosive ones.

Point

Energy efficient → It only consumes 400 W at base pressure.
Small footprints, light weight → Footprint : 0.11 m² (230X450 mm)　Weight : 60 kg
Small utility consumption → It uses less cooling water and purge gas.
Conforms to the international standards

Industrial fields

Semiconductor / Electronic components
Optical Industry
Display
Laboratory instruments
Metal and Steel
Energy
Material
Automotive / Aviation
Medical / Pharmaceuticals
Machinery
Foods
Transport

Product Lineup

ER100D/ER100DC

FR SERIES

Air-cooled Multi-stage Roots Vacuum Pumps

The FR Series is a compact, air-cooled dry vacuum pump that requires no cooling water. Its high pumping speed near atmospheric pressure makes it ideal for cyclic pump-down applications. The pump maintains the high pumping speed down to the base pressure, reducing the pump-down time.

A multi-stage pair of counter-rotating lobed rotors cyclically transfers volumes filled with gas from the inlet to the outlet. The rotors and the casing have little clearance without contact.
Although the bearings and the gears are lubricated with oil, the shaft seal prevents the lubricated oil from leaking into the vacuum side. The shaft seal also prevents exhaust gas and debris from entering the bearing and lubricant chamber.

Point

Continuous atmospheric pumping capability → 800 L/min pumping speed at atmospheric pressure
High Water Vapor Tolerance → Max Water Vapor Pumping Rate 500 g/hr
Short Pump-Down Time → Constant pumping speed down to the base pressure
Air-cooled → Large 1000 L/min (36 CFM) Pumping Speed for a air cooled dry pump