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Products
- Osaka Vacuum，Ltd. Top page
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Material
High-performance architectural glass has a Low-E coating. Since they are deposited by sputtering, the process uses turbo molecular pumps with high pumping speed and high throughput for heavy Ar gas. Our TGkine®-B series, TGkine®-R series, and TG-M series magnetically levitated turbomolecular pumps and TG-F series grease-lubricated ball-bearing type turbo molecular pumps are suitable for these applications.
The production of CFRP parts, which the car industry starts using as one of the component materials, also utilizes a vacuum. We have a lineup of single-stage, direct-drive oil-sealed rotary vane vacuum pumps VSV series, suitable for repetitive pump down from atmospheric pressure.
Carbon nanomaterials, for which various applications are being studied, are produced by CVD in a vacuum. We have a lineup of multi-stage Roots-type dry vacuum pumps ER series, which are compact, generate a clean vacuum, and pump corrosive gases.
Recommended pumps
Sputtering
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®MI-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit with Temp. Control)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TGkine®MI-R series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-MI series (Magnetically Levitated Turbo Molecular Pump with Temp. Control)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
Oil Diffusion Pumps
Dry Vacuum Pumps
- EcopositiV® series ER100D / ER100DC (Energy Saving Dry Vacuum Pump)
- FR060D (Air Cooled Dry Vacuum Pump)
Oil-sealed Rotary Vacuum Pumps
CVD
Turbo Molecular Pumps
- TGkine®-B series (Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit)
- TGkine®-R series (Magnetically Levitated Turbo Molecular Pump)
- TG-M series (Magnetically Levitated Turbo Molecular Pump)
- TG-F series (Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump)
- TG series (Oil Lubricated Ball Bearing type Turbo Molecular Pump)
Roots Vacuum Pumps
- RA100 (Small Direct Drive type with Aluminum Rotor & Stator)
- RD series (Direct Drive type)
- R6002, R12001 (Large Belt Drive type)
Oil-sealed Rotary Vacuum Pumps
Degassing, Drying
Roots Vacuum Pumps
- RA100 (Small Direct Drive type with Aluminum Rotor & Stator)
- RD series (Direct Drive type)
- R6002, R12001 (Large Belt Drive type)
Dry Vacuum Pumps
- EcopositiV® series ER100D / ER100DC (Energy Saving Dry Vacuum Pump)
- FR060D (Air Cooled Dry Vacuum Pump)
Oil-sealed Rotary Vacuum Pumps
Ejectors