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Turbo Molecular Pumps
Any Orientation Type
TG-F Series
Magnetically Levitated Type
TG-M Series
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with Integrated Control Unit TGkine
®
-B Series
Magnetically Levitated Type
TGkine
®
-R Series
Oil Lubricated Type
TG Series
Helical Groove Pump
TS Series
Turbo Molecular Pumping System
Roots Vacuum Pumps
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a Turbo Molecular Pump.
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a Dry Vacuum Pump.
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an Oil-sealed Rotary Vacuum Pump.
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