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Turbo Molecular Pumps
Any Orientation Type
TG-F Series
Magnetically Levitated Type
TG-M Series
Magnetically Levitated Type
with Integrated Control Unit TGkine
®
-B Series
Magnetically Levitated Type
TGkine
®
-R Series
Oil Lubricated Type
TG Series
Helical Groove Pump
TS Series
Turbo Molecular Pumping System
Roots Vacuum Pumps
RD Series
RA Series
R Series
Oil-sealed Rotary Vacuum Pumps
P series
K series
Liquid-ring Vacuum Pumps
W series
Oil Diffusion Pumps
Ejectors
Dry Vacuum Pumps
ER Series: Energy-saving, Multi-stage Roots Pumps
FR Series: Air-cooled Multi-stage Roots Pumps
DSP Series: Compact Dry Screw Pumps
Vacuum Systems
Vacuum System Using
a Turbo Molecular Pump.
Vacuum System Using
a Dry Vacuum Pump.
Vacuum System Using
an Oil-sealed Rotary Vacuum Pump.
Vacuum System Using
a Liquid-ring Vacuum Pump
Vacuum System Using
a Roots Vacuum Pump
Vacuum System Using
an Ejector.
Vacuum Equipments
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