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Laboratory instruments
Mass spectrometers, electron microscopes, X-ray diffractometers, other precision analyzers, and measuring instruments often make the inside vacuum to eliminate the air from the measurement.
The sample introduction port and detector are differentially pumped in mass spectrometers and He leak detectors based on it. Split-flow turbo molecular pumps with multiple intake ports of different compression ratios can provide differential pumping in a single unit. We offer custom-made pumps to meet each system's requirements.
In electron microscopes, a high vacuum is maintained inside the microscope so that gas molecules in the atmosphere do not block electrons used for observation. The vacuum pump for it must be low-vibration. We offer the TG-ML series ultra-low vibration magnetically levitated turbo molecular pumps and the DSP series low-vibration, low-noise screw-type dry pumps.
Mass Spectrometer
Turbo Molecular Pumps
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
Electron Microscope
Turbo Molecular Pumps
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
Surface Analysis
Turbo Molecular Pumps
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps
X-ray Diffraction
Turbo Molecular Pumps
Dry Vacuum Pumps
Oil-sealed Rotary Vacuum Pumps