Products

Energy Efficient Heated Type TG-MI series

  • Energy Efficient Heated Type TG-MI series
  • Energy Efficient Heated Type TG-MI series

The TG-MI series is designed to reduce the condensation rate of build-up
inside Turbo molecular pump (TMP). Osaka's patented thermal insulation
structure with Temperature management system (TMS) made effective.

 

■ Our Energy Efficient solution to the process by-product built up inside the TMP

- Combining the heat generated by the fast speed TMP rotor and built-in TMS(Temperature Management System), temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time & elongated MTBS(mean time between service)!
- Our patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the TMP where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up.
- Improved pump life cycle & reduced frequency of pump maintenance requirement - Increased system uptime.

 

■ Our TG-MI breakthrough - Energy Efficient Theraml Insulated Structure

- Our patented Thermal Insulated Structure preserves and redistributes the heat of compression generated by the fast speed rotor to the specific hoto spots inside the TMP, preventing by-product condensation during process operation.
- Combining with the built-in TMS, Energy Conservation is achieved comparing to the standard method of direct TMS.
- Improved heat transfer allowing users to efficiently to maintain the pump "inside" temperature up to 90℃ - a dramatic process versatility improvement.

Application

Semiconductor processes, LCD/TFT/MEMS manufacturing tools.


Specifications

 
TG390MI
TG420MI
TG900MI
TG1300MI
TG2400MI
Inlet flange
VG100

ISO-B100
VG150

ISO-B160
VG150

ISO-B160
VG200

ISO-B200
VG250

ISO-B250
Volume flow rate
N2 (L/s)
340
400
900
1300
2400
N2
(with protective
screen) (L/s)
320
370
860
1230
2300
H2 (L/s)
290
300
1050
1200
1100
Max. compression ratio
N2
1×108
H2
4.5×103
1.5×104
8.3×102
Base pressure
(Pa/Torr)
< 1×10-6/ < 7.5×10-9
Max. throughput※1 
N2(sccm)
1000
3000
Startup time (min)
2-3
4-5
Shutdown time (min)
4-5
Max. backing pressure
(Pa/Torr)
350/2.6
500/3.8
150/1.1
Recommended backing vacuum pump (L/min)
≧160
≧250
≧500
Weight (kg) 
18
42
56
Controller
TC010MAT

*1 : In case of the backing vacuum pump of 320L/min(TG390/420MI), 1000L/min(TG900/1300/2400MI).

Drawing of outside dimensions

Drawing of outside dimensions


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Performance curve

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Controller

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