Product Search

Energy Efficient Heated Type TG-MI series

  • Energy Efficient Heated Type TG-MI series

The TG-MI series is designed to reduce the condensation rate of build-up
inside Turbo molecular pump (TMP). Osaka's patented thermal insulation
structure with Temperature management system (TMS) made effective.

 

■ Our Energy Efficient solution to the process by-product built up inside the TMP

- Combining the heat generated by the fast speed TMP rotor and built-in TMS(Temperature Management System), temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time & elongated MTBS(mean time between service)!
- Our patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the TMP where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up.
- Improved pump life cycle & reduced frequency of pump maintenance requirement - Increased system uptime.

 

■ Our TG-MI breakthrough - Energy Efficient Theraml Insulated Structure

- Our patented Thermal Insulated Structure preserves and redistributes the heat of compression generated by the fast speed rotor to the specific hoto spots inside the TMP, preventing by-product condensation during process operation.
- Combining with the built-in TMS, Energy Conservation is achieved comparing to the standard method of direct TMS.
- Improved heat transfer allowing users to efficiently to maintain the pump "inside" temperature up to 90℃ - a dramatic process versatility improvement.

 

Application

Semiconductor processes, LCD/TFT/MEMS manufacturing tools.


Specifications

Drawing of outside dimensions

Contact our sales representative for more information.

Performance curve

Contact our sales representative for more information.

Controller

Contact our sales representative for more information.