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Vacuum technology ; Necessity in Various Industries
Vacuum technology is an essential technology in many diverse industries.
In automobile industry, vacuum equipment is continuously used in main coating processes for headlights, mirrors, window grasses, car cameras (CMOS) and sensors (MEMS and Optical Sensor). Electronics industry is also required to have vacuum process for manufacturing various machines and infrastructures related with IoT, in addition to semiconductors and flat display panels for TVs and smartphones. Medical sterilization equipment, accelerators for cancer and freeze-drying for medicines and instant foods also need vacuum technology.
Semiconductor / Electronic components
Concrete examples
Wafers, Large-scale integrated circuits (LSI), Memory, Photomasks, Crystal silicon ingots, Data storage device, Sensors, Magnetic heads, Capacitors, Microelectromechanical systems (MEMS), Thermal heads, Crystal Oscillators, etc.
Semiconductor devices are manufactured by repeating processes such as film deposition, photoresist exposure, etching, and ion implantation on a wafer. Many of these processes are performed, and their results are inspected in a vacuum environment. Dry Vacuum Pumps are used for medium and low vacuum processes, and Turbo Molecular Pumps and cryo pumps are used for high vacuum processes.
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Thin Film Coating
Concrete examples
Lenses, Mirrors, Optical filters, Optical devices, Optical fibers, Mobile phone housing, Lame fabric, Packaging materials, etc.
Among optical components such as lenses and mirrors, highly functional ones are manufactured by depositing functional films such as anti-reflection coatings or optical filters on base materials using PVD processes such as evaporation or sputtering.
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Automotive / Aviation
Concrete examples
Brazing in automobile parts, Leak test, Vacuum plating, Vacuum forming, Carbon Fiber Reinforced Plastics (CFRP) for aircraft, Resin molding, Marine equipments, etc.
In manufacturing parts and components for cars or aircraft, where high reliability is required, a vacuum is used for leak inspection of parts, heat treatment, and consistent quality of materials. For example, a helium leak detector is used for leak inspection of parts. A split-flow turbo molecular pump with multiple inlet ports of different compression ratios provides differential pumping in a single unit. We manufacture split-flow types to meet each specification of leak detectors.
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Material
Concrete examples
Advanced materials (superalloys, carbon nanotubes, etc.), Pulp, Paper, Rubber, Glass, Fine ceramics, etc.
High-performance architectural glass has a Low-E coating. Since they are deposited by sputtering, the process uses turbo molecular pumps with high pumping speed and high throughput for heavy Ar gas. Our TGkine®-B series, TGkine®-R series, and TG-M series magnetically levitated turbomolecular pumps and TG-F series grease-lubricated ball-bearing type turbo molecular pumps are suitable for these applications.
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Metal and Steel
Concrete examples
Steel melting and degassing, Metallurgical processes of precious metals or refractory metals, Vacuum carburizing, Annealing, Quenching, Brazing, Electron beam welding, etc.
In producing high-quality steel, vacuum degassing removes dissolved gas from molten steel, vacuum carburizing furnaces improve wear resistance by diffusing carbon into the surface, and vacuum melting furnaces are used for refining high-performance alloys. These applications require pumping down to several tens of Pa in a few minutes. The gases in the processes also contain a large amount of dust.
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Chemical
Concrete examples
Distilling and refining of petroleum, coal & natural gas, Drying plastic pellets, Distilling of polymer materials, Production of Synthetic fibers, etc.
Naphtha is fractionated from crude oil, and petrochemical plants manufacture various petrochemical products from it, such as plastics, synthetic rubber, synthetic fibers, paints, and surfactants for detergents. Vacuum is vital in multiple processes such as distillation, polycondensation, drying, degassing, and deodorization by offering beneficial characteristics under reduced pressure.
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Energy
Concrete examples
Photovoltaic cells, Rechargeable batteries, Lithium-ion batteries, etc.
In the manufacturing process of certain types of solar cells, light-absorbing layers, functional films, etc., are deposited in a vacuum. Our TGkine®-B series and TGkine®-R series magnetically levitated turbo molecular pumps satisfy high pumping speed and throughput.
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Medical / Pharmaceuticals
Concrete examples
Freeze drying of serum or antibiotics, Distilling and drying of pharmaceuticals, Electronic medical devices, etc.
In producing pharmaceuticals, vacuum distillations and freeze dryings process sensitive ingredients. Steam ejectors and liquid-sealed vacuum pumps are used there because they are suitable for pumping condensable gases such as water.
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Laboratory instruments
Concrete examples
Accelerator, Analysis equipment, Electron microscope, Mass spectrometer, Gas analyzer, Critical dimension scanning electron microscope (CD-SEM) , etc.
Mass spectrometers, electron microscopes, X-ray diffractometers, other precision analyzers, and measuring instruments often make the inside vacuum to eliminate the air from the measurement.
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Display
Concrete examples
Liquid-crystal display (LCD) , Organic light-emitting diode (OLED) , Quantum dot light-emitting diode (QLED) , microLED, Touchscreen, etc.
Flat panel displays are manufactured by repeating processes such as sputtering, CVD, photoresist exposure, etching, and ion implantation on large glass or plastic substrates. Many processes require a vacuum.
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Aerospace / R & D
Concrete examples
Space chamber, On-board equipment on satelite, Nuclear fusion reactor, Synchrotron radiation facility, Basic research (Universities, Government offices, Research institutes), etc.
Vacuum environments are used in various ways in large-scale scientific projects such as space exploration, ITER, and particle accelerators, as well as in research institutes and laboratories of various sizes.
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Machinery
Concrete examples
Vacuum forming, Vacuum packing, Tool manufacturing, Surface hardening, Die machining, 3D printing, etc.
Electron beam welding, used for welding gears, etc., uses an electron beam accelerated and focused in a high vacuum to weld metals together. A small any-orientation turbomolecular pump pumps down the electron gun section to create a high vacuum. The welding chamber is also under vacuum and is pumped down repeatedly from atmospheric pressure for each work. To do it in short cycles require a high pumping speed. We line up the combinations of RD series roots vacuum pumps and the P series oil-sealed rotary piston pumps, durable against welding dust and can withstand repeated pumping down.
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Foods
Concrete examples
Freeze-drying of vegetables, fruits, coffee, etc., Vacuum distillation of alcoholic drinks, Vacuum cooling for food storage, Vacuum packing, etc.
Meat, vegetables, and prepared foods are vacuum-packed or rapidly cooled in a vacuum to retain their quality for a more extended period. We offer the P series oil-sealed rotary piston vacuum pumps, which are rugged and resistant to repeated pump down from atmospheric pressure, and the W series liquid ring vacuum pumps, which are suitable to pump gases containing water vapor.
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Heavy electrical equipment
Concrete examples
Transformers, Motors, Power cables, Vacuum circuit breaker, Vacuum tubes, etc.
Insulation of motors, generators and transformers can be maintained for a long time by drying the windings in a vacuum to remove moisture from the surface, then impregnating them with insulation material in a vacuum. The insulation paper used in power cables is also dried in a vacuum to maintain its insulation for a long time. These vacuum drying processes require high pumping speeds, and the outgas contain much moisture.
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Transport
Concrete examples
Vacuum chucks, Vacuum tweezers, Waste transport, suction cup for paper transport (at printing, bookbinding, etc.)
A vacuum chuck is used to catch and transport the object for transporting large-sized plates or paper that is not strong or rigid. Vacuum conveyors are used for food processing, pharmaceutical production, and transporting plastic materials (pellets), in which powders and grains are conveyed in an airflow lower than atmospheric pressure.
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