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Pump combination types

• Used with Oil-sealed Rotary Vacuum Pumps

  

  A system that combines an oil-sealed rotary vacuum pump, as a backing pump, with a ball bearing type turbo molecular pump attains ultra-high vacuum at low-cost.

• Used with Dry Vacuum Pumps

  

  Integrating the dry vacuum pump, as a backing vacuum pump for the magnetically suspended bearing type turbo molecular pump, attains an oil-free and clean ultra-high vacuum.

• Tandem Turbo Molecular Pumps

  

  A tandem system has TMP used as a backing pump of TMP which can attain XHV. The system is used to obtain high exhaust rate of hydrogen at extremely high vacuum ranges, and attain a stabler vacuum.

• Used with the Getter Pump and Other Models

  

  Integrating a turbo molecular pump with an ultra-high vacuum pump such as an ion pump, Getter pump, or non-evaporating type Getter pump (NEG pump), offers an easy means for exhausting various gases under ultra-high vacuums, and makes the ultra-high vacuum more stable.