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Turbo Molecular Pumps
ST Series (TG-F series + Rotary Vane Pump)

ST Series (TG-F series + Rotary Vane Pump)

■High vacuum exhaust unit.

■Exhaust up to high vacuum with a simple operation.

■Since it has casters, it can be easily moved to the desired place for use.

■Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance!
　This unit is portable while it is operating.

■Optional devices and apparatuses are available to match your needs.

Specifications
Dimensions

Specifications

Model		ST050F*050	ST220F*050	ST350F*050
Turbo Molecular Pump		TG50F	TG220F	TG350F
Volume flow rate (N₂; L/s)		51(49)^※1	220(210)^※1	350(330)^※1
Base Pressure	(Pa)	<3×10^-6	<1×10^-6
	(Torr)	<2.3×10^-8	<7.5×10^-9
Inlet flange		VG65/ISO-R63/CF63	VG100/ISO-R100/CF100
Backing pump		Oil-sealed rotary vane pump 50/60 L/min (50/60Hz)
Cooling system		Air cooling
Power supply		Single phase, AC100V
Standard equipment configuration		TMP TMP Controller ST Controller Oil-sealed rotary vane pump Automatic slow leak valve Vacuum valve Oil mist trap Aluminum trestle

*1 : Figures in parenthesis represent exhaust rate with protective steel mesh.
In addition to our standard specifications, we can also manufacture exhaust units designed to customer requirements. (For details, contact our sales representative)

Drawing of outside dimensions

Model	A	B	C
ST050FV050	VG65	486	155
ST050FR050	ISO-R63	507	155
ST050FC050	CF63	521	155
ST220FV050	VG100	539	175
ST220FR050	ISO-R100	539	175
ST220FC050	CF100	559	175
ST350FV050	VG100	569	175
ST350FR050	ISO-R100	553	175
ST350FC050	CF100	569	175

Reprinting prohibited without permission. Contents are subject to change without notice.