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TG2400F
■ Any orientation
■ Compact size
■ Energy-saving
■ Quick start up
■ Quick shut down with gas vent
■ Durable structure for air inrush
■ Serial communication
※RS232C Serial interface
■ Certificated safety standard NRTL / SEMI-S2 / CE
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
Model |
TG2400F |
TG2400F-40 |
|
Inlet flange |
VG250/ISO-B250 |
||
Volume flow rate |
N2 (L/s) |
2400 |
|
N2 (L/s) |
2300 |
||
H2 (L/s) |
1100 |
||
Max. compression ratio |
N2 |
1×108 |
|
H2 |
1.4×103 |
||
Base pressure |
(Pa/Torr) |
<1×10-6/<7.5×10-9 |
|
Max. throughput※1※2 |
(sccm) |
900 |
1500 |
Startup time |
(min) |
5-7 |
|
Shutdown time |
(min) |
15-18 |
|
Max. backing pressure |
(Pa/Torr) |
200/1.5 |
|
Recommended backing vacuum pump |
(L/min) |
≧500 |
|
Position |
Any orientation |
||
Weight (kg) |
Air cooling Water cooling |
45 47 |
|
Controller |
TC2403 |
TC2403-10※3 |
|
*1 : When using a backing vacuum pump of 1000L/min.
*2 : Differs according to the power supply model.
*3 : TG2400F-40
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| A | B | C | D |
| VG250 | φ350 | 16 | 340 |
| ISO-B250 | φ335 | 16 | 340 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC2403 / TC2403-10 |
| Input Voltage (ACV) | 200-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 1200 |
| Rated Output Frequency (Hz) | 520 |
| Weight (kg) | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
| TMP | TG2400F TG2400F-40 |