Products

TG2400F

  • TG2400F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush 

■ Serial communication
  ※RS232C Serial interface

■ Certificated safety standard NRTL / SEMI-S2 / CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Model
TG2400F
TG2400F-40
Inlet flange
VG250/ISO-B250
Volume flow rate
N2 (L/s)
2400
N2
(with protective screen) 
(L/s)
2300
H2 (L/s)
1100
Max. compression ratio 
N2
1×108
H2
1.4×103
Base pressure
(Pa/Torr)
<1×10-6/<7.5×10-9
Max. throughput※1※2
(sccm)
900
1500
Startup time
(min) 
5-7
Shutdown time
(min) 
15-18
Max. backing pressure
(Pa/Torr)
200/1.5
Recommended backing 
vacuum pump
(L/min)
≧500
Position
Any orientation
Weight
Air cooling
Water cooling
45
47
Controller
TC2403
TC2403-10※3

*1 : When using a backing vacuum pump of 1000L/min.
*2 : Differs according to the power supply model.
*3 : TG2400F-40

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D
VG250 φ350 16 340
ISO-B250 φ335 16 340
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC2403 / TC2403-10
Input Voltage (ACV) 200-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 1200
Rated Output Frequency (Hz) 520
Weight (kg) 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction, Serial communication instruction): 1 copy
TMP TG2400F    TG2400F-40