Products

Oil Diffusion Pumps

  • Oil Diffusion Pumps
  • Oil diffusion pumps attain high vacuum, and are used as the exhaust system for a wide variety of vacuum processes such as vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering.
  • The lineup includes pumps with an volume flow rate of 10,000L/s or higher (without baffles).
  • This is a highly reliable high vacuum pump with little pressure fluctuation even with bumping the pumping fluid.
  • It uses no mechanical moving parts, resulting to be robust and long lifetime.
  • Easy to disassemble design simplifies internal cleaning and inspection work.

Specifications

Standard specifications
Model number*1 DP2 DP3 DP4 DP6 DP8 DP10
Volume flow rate
(L/s)
No baffles 125 280 380 810 1450 2070
With standard baffle 58 150 215 465 790 1200
Base pressure (Pa) ~10-5
Maximum forepressure (No load; Pa) 20 15
Backstreaming rate
(with standard baffle) (mg/cm2・min)
<10-4
Standard baffle Water-cooled louvers
Heater Power supply AC100V,1φ AC200,1φ
Electrical power (kW) 0.33 0.5 0.7 1 1.4 1.9
Oil capacity (L) 0.05 0.1 0.15 0.34 0.5 0.82
Cooling water flow rate
(Includes waterfor baffles)*2
(m3/h)
0.03 0.06 0.09 0.18 0.24 0.3
Weight (kg) 4 6 8 20 30 41
Recommended backing pump*3 VRD-4 VRD-8 VRD-24 VRD-48 P90 P180/P222

 

Standard specifications
Model number*1 DP14 DP18B DP22B DP24B DP28B DP36
Volume flow rate
(L/s)
No baffles 3600 8000 12800 13200 17700 40000
With standard baffle 2350 4600 6900 7900 9800 18000
Base pressure (Pa) ~10-5
Maximum forepressure (No load; Pa) 15 59 65 65 67 27
Backstreaming rate
(with standard baffle) (mg/cm2・min)
<10-4
Standard baffle Water-cooled louvers
Heater Power supply AC200,3φ
Electrical power (kW) 4.5 3.5 5.4 6.6 8 15
Oil capacity (L) 1.6 2.2 3 3.5 4.5 9
Cooling water flow rate
(Includes waterfor baffles)*2
(m3/h)
0.42 0.3 0.42 0.6 Upper: ≦0.18
Lower: ≦0.54
2.4
Weight (kg) 135 110 167 210 250 1000
Recommended backing pump*3 Select according to specifications

 

*1 : Model numbers with a "B" at the end are energy-saving, space-saving models.
*2 : Maximum cooling water temperature should be 25℃.
*3 : The auxiliary vacuum pump must be selected according to the size of the target exhaust system and other specifications.
(For details, contact our sales representative)

Standard accessories

  • Hydraulic oil (Lion A) -- for 1 unit
  • Gaskets for intake and exhaust (nitryl rubber) -- 1 set
  • Oil level gauge (DP10 or higher) -- 1 set
  • Oil supply and drain port (DP10 or higher) -- 1 set
  • Bimetal (DP8 to DP22B) -- 1 set
  • Thermostat (DP18B or higher) -- 1 set

Drawing of outside dimensions

Drawing of outside dimensions