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● Strong rotary shaft.
→ Enables start-up and continuous operation in low vacuum.
● Optimal motor capacity can be selected to fit the specific load.
→ Less equipment cost, less operation cost.
● Wide range of pump speed lineup.
● Work with various backing pumps.
→Roots＋oil-sealed rotary, liquid-ring
● Semiconductor, Electronics Industry
● Nuclear Energy Development Research
● Science & Engineering
● Automobile, Machinery, Aircraft Industry
● Heavy Electrical Equipment
● Optical Industry
● Steel, metal industry
● Chemistry, Pharmaceutical industry
● Food Industry
● Metalworking Industry
● Energy connection
|Nominal volume flow rate ※1 (m3/h)||50Hz||500|
|Allowable pressure difference (kPa)
[When using a standard motor]
Base pressure (Pa)
|Volume flow rate of standard backing pump (m3/h)||90～220|
|Rotation speed (r/min)||50Hz||1500|
|Standard motor output (kW)||2.2|
|Oil capacity (L)||2.7|
|Cooling water consumption ※2 (m3/h)||0.4|
|Weight (kg)||With totally enclosed
fan cooling motor
*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.
Drawing of outside dimensions