• TG220F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush
  ※Air inrush test (continual 400 times)

■ Serial communication
  ※RS232C Serial interface

■ Certificated safety standard NRTL / SEMI-S2 / CE


■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Inlet flange VG100
Volume flow rate N2 (L/s) 220
N2 (with protective screen)
H2 (L/s) 100
Max. compression ratio N2 1×108
H2 4×102
Base pressure  (Pa)
Max. throughput※1 (sccm) 400
Startup time (min)  1-1.2
Shutdown time (min)  2.5-3.5
Max. backing pressure (Pa/Torr) 260/2
Recommended backing
vacuum pump
(L/min) ≧80
Position Any orientation
Weight VG・ISO-R/CF(kg)  5.5/8
Controller TC223

*1 : When using a backing vacuum pump of 160L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions

VG100 φ185 15 200
CF100 φ152 21 220
ISO-R100 φ130 12 200
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.




Controller model TC223
Input Voltage (ACV) 100-110 (±10%)
200-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 590
Rated Output Frequency (Hz) 800
Weight (kg) 2.7
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Manual (Instruction, Serial communication instruction): 1 copy