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TG220F
■ Any orientation
■ Compact size
■ Energy-saving
■ Quick start up
■ Quick shut down with gas vent
■ Durable structure for air inrush
※Air inrush test (continual 400 times)
■ Serial communication
※RS232C Serial interface
■ Certificated safety standard NRTL / SEMI-S2 / CE
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Inlet flange | VG100 ISO-R100 CF100 |
|
| Volume flow rate | N2 (L/s) | 220 |
| N2 (with protective screen) (L/s) |
210 | |
| H2 (L/s) | 100 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 4×102 | |
| Base pressure | (Pa) (Torr) |
<1×10-6 <7.5×10-9 |
| Max. throughput※1 | (sccm) | 400 |
| Startup time | (min) | 1-1.2 |
| Shutdown time | (min) | 2.5-3.5 |
| Max. backing pressure | (Pa/Torr) | 260/2 |
| Recommended backing vacuum pump |
(L/min) | ≧80 |
| Position | Any orientation | |
| Weight | VG・ISO-R/CF(kg) | 5.5/8 |
| Controller | TC223 | |
*1 : When using a backing vacuum pump of 160L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| A | B | C | D |
| VG100 | φ185 | 15 | 200 |
| CF100 | φ152 | 21 | 220 |
| ISO-R100 | φ130 | 12 | 200 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC223 |
| Input Voltage (ACV) | 100-110 (±10%) 200-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 590 |
| Rated Output Frequency (Hz) | 800 |
| Weight (kg) | 2.7 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
| TMP | TG220F |