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Product Search
TS440 / 443
- All helical groove stage type rotor
- High gas throughput at medium to low vacuum
- Durable structure against more than 300,000 times of air inrush
- Conformance to safety standards: NRTL / SEMI-S2 / CE
Application
- Semiconductor manufacturing
- Electron gun, Ion source
- Surface treatment, Surface modification
- Electronic components manufacturing
- Light bulb manufacturing, optical components manufacturing
- Accelerator, Radiation facility, Nuclear fusion research
- Vacuum furnaces
- Research and development
Specifications
| Inlet flange | VG150 CF160 ISO-B160 |
|
| Volume flow rate | N2 (L/s) | 440 |
| N2 (with protective screen) (L/s) | 410 | |
| H2 (L/s) | 320 | |
| Max. compression ratio |
N2 | 2×106 |
| H2 | 1×103 | |
| Max. throughput *1, *2 | N2 (sccm) | 10860 |
| Startup time | (min) | 10～14 |
| Shutdown time | (min) | 23～28 |
| Base pressure *3 | (Pa） | < 1×10-5 |
| (Torr） | < 7.5×10-8 | |
| Max. backing pressure | (Pa) | 2000 |
| (Torr） | 15 | |
| Recommended backing pump |
(L/min) | ≧500 |
| Orientation | Vertical (±10°) | |
| Weight | (kg) | 60 |
*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a backing vacuum pump of 1000L/min.
*3: Pressure attained after 48 hours of bake-out.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG150 | φ235 | 16 | 387 | 430 |
| CF160 | φ203 | 22 | 387 | 430 |
| ISO-B160 | φ225 | 16 | 387 | 430 |
・All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.
Performance curve
* Reprinting is prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC443S | |
| Input Voltage | AC180 - 253V | |
| Input Phases | Single | |
| Input frequency | (Hz) | 50 / 60 |
| Max. required power | (kVA) | 2.2 |
| Weight | (kg) | 8.2 |
| Communication interface | Parallel I/O・RS232C | |
| Standard accessories | ・Input connector: 1 ・Remote connector: 1 ・Serial communication connector: 1 ・Manual (Instruction, Serial communication instruction): 1 copy each |
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