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TS50

All helical groove stage type rotor
High gas throughput at medium to low vacuum
Durable structure against more than 300,000 times of air inrush
Conformance to safety standards: NRTL / SEMI-S2

Application

Semiconductor manufacturing
Electron gun, Ion source
Surface treatment, Surface modification
Electronic components manufacturing
Light bulb manufacturing, optical components manufacturing
Accelerator, Radiation facility, Nuclear fusion research
Vacuum furnaces
Research and development

Specifications
Dimensions
Performance curve
Controller

Specifications

Inlet flange		VG100 CF100 ISO-R100
Volume flow rate	N₂ (L/s)	25
	N₂(with protective screen) (L/s)	23
	H₂ (L/s)	13
Max. compression ratio	N₂	2×10⁶
Max. compression ratio	H₂	50
Max. throughput ^{1, 2}	N₂ (sccm)	600
Startup time	(min)	2.5～3.5
Shutdown time	(min)	2.5～5
Base pressure ^*3	(Pa)	< 1×10^-4
Base pressure ^*3	(Torr)	< 7.5×10^-7
Max. backing pressure	(Pa)	1200
Max. backing pressure	(Torr)	9
Recommended backing pump	(L/min)	≧80
Orientation		Vertical (±10°)
Weight	(kg)	11

*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a 160L/min backing pump
*3: Pressure attained after 48 hours of bake-out.

Drawing of outside dimensions

Ⓐ	Ⓑ	Ⓒ	Ⓓ	Ⓔ	Ⓕ	Ⓖ	Ⓗ
VG100	φ185	15	264	185	238	226	215
CF100	φ152	21	264	185	236	226	215
ISO-R100	φ130	12	262	183	234	224	213

・All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.

Performance curve

* Reprinting is prohibited without permission. Contents are subject to change without notice.

Controller

Controller model		TC203
Input Voltage		AC100-110 V AC200-230 V
Input Phases		Single
Input frequency	(Hz)	50 / 60
Max. required power	(kVA)	0.61
Weight	(kg)	2.7
Communication interface		Parallel I/O・RS232C
Standard accessories		・Input connector: 1 ・Remote connector: 1 ・Serial communication connector: 1 ・Manual (Instruction, Serial communication instruction): 1 copy each