EventsSEMICON JAPAN 2021 on 15th – 17th December

※The exhibition has successfully finished on December 17th. Thank you for visiting to our booth at SEMICON JAPAN 2021.


OSAKA VACUUM will hold a booth at SEMICON JAPAN 2021.


Our products are widely used on various applications in semiconductor manufacturing, such as deposition, etching, lithography, ion implantation, packaging, inspection, etc. to successfully create vacuum environments required. In this show, we are delighted to showcase our vast product lineup including the energy efficient heated type turbo molecular pump: TGkine4200MI-B, ultra-low vibration type turbo molecular pump: TG420ML and dry vacuum pump: DSP50, which get plenty of achievements among semiconductor industries.


We are looking forward to seeing you at SEMICON JAPAN 2021!


SEMICON JAPAN 2021 Promotion Movie (Japanese)

SEMICON JAPAN 注目エリアを体感!編 from SEMI Japan on Vimeo.


Exhibit Products

  • Energy Efficient Heated type Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit: TGkine4200MI-B
  • Magnetically Levitated Turbo Molecular Pump & Controller: TGkine3404M-R, TC0331M
  • Ultra-Low Vibration type Magnetically Levitated Turbo Molecular Pump: TG420ML
  • Compact Dry Screw Vacuum Pump: DSP50
  • High Vacuum Angle Valves (Manual type, Pneumatic type)


Exhibit Dates and Venue

  • Date: December 15 – 17, 2021
  • Venue: Tokyo Big Site, East Exhibition Halls, Tokyo, Japan
  • Booth No.: 4704