Dates
December 9 – 11, 2026
Venue
Venue: Tokyo Big Sight, East Exhibition Halls, Tokyo, Japan
Booth No.: E2207
Admission fee: Free
Pre-registration is required for admission. Please proceed to the pre-registration form from “Visitor / Seminar Registration” and complete the pre-registration.
OSAKA VACUUM will hold a booth at SEMICON JAPAN 2026 from December 9th to 11th.
In this show, we will showcase our turbo molecular pumps and dry vacuum pumps essential for various semiconductor manufacturing processes, including sputtering, etching, lithography, ion implantation, and inspection.
This year, we will present our extensive product lineup designed to support a wide range of vacuum applications, including two new products: a 6,000 L/s-class magnetically levitated turbo molecular pump and a 1,000 L/s-class magnetically levitated helical-groove vacuum pump.
We will also exhibit some of our main products, including TGkine2200M-B, the magnetically levitated turbo molecular pump with integrated control unit; TGkine3400M-R, the magnetically levitated turbo molecular pump; and ER100D, the energy-saving multi-stage roots dry vacuum pump, which has plenty of achievements in the semiconductor industry.
We sincerely look forward to welcoming you all to our booth.
Product Description
CONTACT
“SEMICON JAPAN 2026” Official Website: https://www.semiconjapan.org/en
Osaka Vacuum, Ltd.: https://www.osakavacuum.co.jp/en/contact/
