Magnetically Levitated Turbo Molecular Pumps
Magnetically levitated turbo molecular pumps operate completely oil-free by suspending the rotor with electromagnets. This allows the rotor to rotate at ultra-high speeds with minimal vibration and noise, generating an oil-free, clean vacuum environment.
The magnetic bearing of our magnetically levitated turbo molecular pumps actively controls all five axes with electromagnets, enabling stable operation in any orientation.
List of Magnetically Levitated Turbo Molecular Pumps
TGkine® Series
TGkine®-B SERIES
Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit
Standard Type & Corrosive Resistant Type with a pumping speed of 1700 L/s to 4200 L/s.
The controller and power supply are integrated into the pump, eliminating the need for cables between them and the rack space. This helps make the vacuum system more compact.
To enhance the strength of the TG-M series, the rotor design has been optimized to further improve the pumping performance.
Point
Integrated controller and power supply・Space saving, energy saving・Large volume flow rate, high gas throughput
Various communication options (including EtherCAT)・In-house magnetic bearing provides stable operation・Low speed mode
Industrial fields
- Semiconductor / Electronic components
- Optical Industry
- Display
- Laboratory instruments
- Metal and Steel
- Energy
- Material
- Automotive / Aviation
- Medical / Pharmaceuticals
- Aerospace / R & D
- Machinery
Cross-section
TGkine®-R SERIES
Magnetically Levitated Turbo Molecular Pumps
Standard Type & Corrosive Resistant Type with a pumping speed of 1700 L/s to 4200 L/s.
The TGkine-R series offers the same performance as the TGkine-B series (on-board type) with a separate, rack-mounted controller for limited-height spaces. The TGkine-R series stores operation data, such as the touchdown count, in the pump body, so the data is retained even if the controller is replaced during an overhaul.
Point
Space saving / Energy saving・High gas throughput・Various communication options (including EtherCAT)
In-house magnetic bearing provides stable operation・Low speed mode・Pump body memory to store the hours and other operation
Industrial fields
- Semiconductor / Electronic components
- Optical Industry
- Display
- Laboratory instruments
- Metal and Steel
- Energy
- Material
- Automotive / Aviation
- Medical / Pharmaceuticals
- Aerospace / R & D
- Machinery
Cross-section
TG-M Series
TG-M SERIES
Magnetically Levitated Turbo Molecular Pumps
Standard type & Corrosive Resistant type with a pumping speed of 340 L/s to 2400 L/s.
The magnetically levitated rotor creates a clean, oil-free vacuum and enables a long maintenance cycle.
Point
Auto calibration of the magnetic bearing sensors at startup
Adjustable speed・Wide range of customizable options
Industrial fields
- Semiconductor / Electronic components
- Optical Industry
- Display
- Laboratory instruments
- Metal and Steel
- Energy
- Material
- Automotive / Aviation
- Medical / Pharmaceuticals
- Aerospace / R & D
- Machinery
Cross-section
TG-M7 SERIES
Magnetically Levitated Turbo Molecular Pumps
Standard & Corrosive Resistant type with a pumping speed of 340 L/s to 1300 L/s.
Point
Energy saving・Pump body memory to store the hours and other operation data
Various communication interfaces. (EtherCAT compatible)
Industrial fields
- Semiconductor / Electronic components
- Optical Industry
- Display
- Laboratory instruments
- Metal and Steel
- Energy
- Material
- Automotive / Aviation
- Medical / Pharmaceuticals
- Aerospace / R & D
- Machinery
Custom models
Energy Efficient Heated type
TGkine-MI series and TG-MI series heats itself up and reduces condensation at processes with by-products. Osaka Vacuum’s patented thermally insulated structure with temperature management system (TMS) heats the pump up efficiently.
TGkine®-MI SERIES / TG-MI SERIES
Point
In addition to the external heater, the target area is heated by the friction between the process gas and the pump walls.
The heat-insulating stator enables high temperature at the target area with less heat from the external heater.
The heat-insulating stator lowers the temperature in other areas and reduces the rotor creep.
The exhaust port is also heated and prevents by-products deposition there.
Heat insulation is also applied to the exhaust port (TG-MI Series only).
Case study for Dry etching process
Standard type
Large byproduct deposits inside the pump and outlet affected performance and could cause the rotor to crash into them.
SGP stator B
Outlet
TG-MI series
The Temperature Management System (TMS) reduces the buildup of byproducts, enabling stable operation of the production line.
SGP stator B
Outlet
Industrial fields
- Semiconductor / Electronic components
- Optical Industry
- Energy
- Material
Radiation-hardened Type
Developed for operation under high radiation environment. High tolerance against radiation.
TG-MR SERIES
Ultra-low Vibration type
For advanced applications including analytical instruments, nanometrology, and next-generation semiconductor lithography that require an ultra-low vibration pump.
TG-ML SERIES
Ultra-high Vacuum type
Can achieve a base pressure close to the ultra-high vacuum range (10−9 Pa order) by a 60,000 compression ratio against H2, low rotor temperature, and reduced outgas from the pump.
TG-MU SERIES
Low helium permeation type
- No polymer on sealing (all metal gaskets, glass hermetic connector)
- For applications that require low Helium permeation
- Tolerant to radiation (up to around 1 MGy)
TG-MM SERIES
Magnetically shielded type
- Can operate in a magnetic field without too much braking effect or heating up on the rotor.
- Applicable to all the Osaka Vacuum TMP
- Suitable for an accelerator. An extra-long cable (up to around 200 m) to a controller is also available.
