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Product Search
- Osaka Vacuum，Ltd. Top page
- Product Search
- Dry Vacuum Pumps
- Dry Screw Vacuum Pump DSP251 / DSP501
Dry Screw Vacuum Pump DSP251 / DSP501
■ Clean Vacuum
No oil back-streaming to the chamber.
■ Maintenance Free
No time gear means no lubricating oil to be maintained.
Maintenance free due to no chip seal change or oil change is required.
■ Compact
Small-size, light-weight, and easy to carry.
■ Air-Cooled Type
No utility required other than the electricity.
■ High-Speed Pump Down
Large pumping speed at close to atmospheric pressure range by the bypass line.
■ Energy Efficient
Application
- SEM
- Analytical Instruments
- Medical Devices
- Accelerator
- Gas Exhausting of Load-Lock / Transfer Chamber
- Ion Source
- Photolithography
- EB-Gun
- General Industry
- PVD
- R&D
Specifications
Model |
DSP 251 |
DSP 501 |
|||
Performance |
Pumping Speed |
w/o Gas Ballast |
L/min |
230 |
500 |
w Gas Ballast |
L/min |
200 |
430 |
||
Base Pressure |
w/o Gas Ballast |
Pa |
0.5 |
||
w Gas Ballast |
Pa |
2 |
|||
Port Dimension |
Inlet |
- |
KF25 |
KF40 |
|
Outlet |
- |
KF25 |
|||
Approx. Weight |
kg |
16 |
21 |
||
Utility |
Power Input |
Phase |
Single Phase |
||
Voltage |
V |
AC100-230 ±10%(50/60Hz) |
|||
Power Capacity |
VA |
450 |
660 |
||
Connector |
- |
Made by Hirakawa Hutec CM11 |
|||
Power consumption |
At Base Pressure |
W |
240 |
270 |
|
Maximum |
380 |
600 |
|||
Drawing of outside dimensions
- Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.