Products

Dry Screw Vacuum Pump DSP251 / DSP501

  • Dry Screw Vacuum Pump DSP251 / DSP501
  • Dry Screw Vacuum Pump DSP251 / DSP501

Clean Vacuum

 No oil back-streaming to the chamber.

■ Maintenance Free

 No time gear means no lubricating oil to be maintained.

 Maintenance free due to no chip seal change or oil change is required.

■ Compact

 Small-size, light-weight, and easy to carry.

■ Air-Cooled Type

 No utility required other than the electricity.

■ High-Speed Pump Down

 Large pumping speed at close to atmospheric pressure range by the bypass line.

■ Energy Efficient

 Low power consumption design.

Application

- SEM
- Analytical Instruments
- Medical Devices
- Accelerator
- Gas Exhausting of Load-Lock / Transfer Chamber
- Ion Source
- Photolithography
- EB-Gun
- General Industry
- PVD
- R&D


Specifications

Model
DSP 251
DSP 501
Performance
Pumping Speed
w/o Gas Ballast
L/min
230
500
w Gas Ballast
L/min
200
430
Base Pressure
w/o Gas Ballast
Pa
0.5
w Gas Ballast
Pa
2
Port Dimension
Inlet
-
KF25
KF40
Outlet
-
KF25
Approx. Weight
kg
16
21
Utility
Power Input
Phase
Single Phase
Voltage
V
AC100-230
±10%(50/60Hz)
Power Capacity
VA
450
660
Connector
-
Made by Hirakawa Hutec
CM11
Power consumption
At Base Pressure
W
240
270
Maximum
380
600

Drawing of outside dimensions

Drawing of outside dimensions


 

  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve

 

  • Reprinting prohibited without permission. Contents are subject to change without notice.