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Product Search
TG5500/5503
■Standard types and corrosive resistant types are available.
■The world's largest volume flow rate compound molecular pump.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
| Inlet flange | VG500 | |
| Volume flow rate | N2 (L/s) | 5500 |
| N2 (with protective screen) (L/s) |
5200 | |
| H2 (L/s) | 4400 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 5×103 | |
| Base pressure | VG (Pa) | <1×10-6 |
| VG (Torr) | <7.5×10-9 | |
| Max. throughput ※1 | N2 (sccm) | 1200 |
| Startup time | (min) | 25-35 |
| Shutdown time | (min) | 30-40 |
| Max. backing pressure | (Pa / Torr) | 200/1.5 |
| Recommended backing vacuum pump |
(L/min) | 1500 |
| Amount of lubrication oil required |
(mL) | 1000 |
| Position | Vertical（±10℃） | |
| Weight | (kg) | 250 |
| Comtroller | TC5503 | |
*1 : When using a backing vacuum pump of 3000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG500 | φ625 | 25 | 560 | 530 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC5503 |
| Input Voltage (ACV) | 200-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 2200 |
| Rated Output Frequency (Hz) | 500 |
| Weight (kg) | 8.7 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite Core: 1 -Oil sensor cable adaptor: 1 -Manual (Instruction) : 1 copy |