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■Standard types and corrosive resistant types are available.
■The world's largest volume flow rate compound molecular pump.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Electronics gun exhaust, ionization source exhaust
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
|Volume flow rate||N2 (L/s)||5500|
|Base pressure||VG (Pa)||<1×10-6|
|Max. throughput ※1||N2 (sccm)||1200|
|Max. backing pressure||(Pa / Torr)||200/1.5|
|Amount of lubrication
*1 : When using a backing vacuum pump of 3000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
|Input Voltage (ACV)||200-230 (±10%)|
|Input Frequency (Hz)||50/60|
|Input Power (VA)||2200|
|Rated Output Frequency (Hz)||500|
|Standard accessories||-Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite Core: 1
-Oil sensor cable adaptor: 1
-Manual (Instruction) : 1 copy