"User registration" is required to download our catalogues.
"*User registration is required to download.
Nonmembers can register.
Log in here or register for user registration.
Registered users can download our electronic catalog (PDF), 2D-CAD data (DXF) ,
3D-CAD data (STEP, IGES), and field network device profile (GSD)."
Product Search
TG1303
■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
| Inlet flange | VG200 CF200 ISO-B200 |
|
| Volume flow rate | N2 (L/s) | 1300 |
| N2 (with protective screen) (L/s) |
1100 | |
| H2 (L/s) | 1000 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 4×103 | |
| Base pressure | VG・ISO-B / CF (Pa) |
<1×10-6 < 1×10-7 |
| VG・ISO-B / CF (Torr) |
<7.5×10-9 <7.5×10-10 |
|
| Max. throughput ※1 | N2 (sccm) | 2715 |
| Startup time | (min) | 9-12 |
| Shutdown time | (min) | 9-13 |
| Max. backing pressure | (Pa / Torr) | 300/2.3 |
| Recommended backing vacuum pump |
(L/min) | 500 |
| Amount of lubrication oil required |
(mL) | 260 |
| Position | Vertical（±10℃） | |
| Weight | (kg) | 50 |
| Comtroller | TC1003 | |
*1 : When using a backing vacuum pump of 1000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG200 | φ300 | 20 | 392 | 330 |
| CF200 | φ253 | 25 | 407 | 345 |
| ISO-B200 | φ285 | 16 | 392 | 330 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
- Reprinting prohibited without permission. Contents are subject to change without notice.\
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC1003 |
| Input Voltage (ACV) | 200-230(±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 1600 |
| Rated Output Frequency (Hz) | 400 |
| Weight (kg) | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction) : 1 copy |