Products

TG1303

  • TG1303

■Corrosive resistant type for corrosive gases.

■Durable structure for air inrush.

■Sturdy, resists external impacts.

■Serial communication
 ※RS232C Serial interface

■Conforms to recognized safety standard
 NRTL / SEMI-S2 / CE

Application

■Semiconductor production

■Electronics gun exhaust, ionization source exhaust

■FPD manufacturing

■Surface treatment, surface modification

■Manufacture of various electronic components

■Lamp production, optical components production

■Accelerating device, radiation facility, nuclear fusion research

■Heat treatment

■Research and development
 *TG-F, TG-M and TGkine series is available for clean processes.


Specifications

Inlet flange VG200
CF200
ISO-B200
Volume flow rate N2 (L/s) 1300
N2
(with protective
screen) (L/s)
1100
H2 (L/s) 1000
Max. compression
ratio
N2 1×108
H2 4×103
Base pressure  VG・ISO-B /
CF (Pa)
<1×10-6
< 1×10-7
VG・ISO-B /
CF (Torr)
<7.5×10-9
<7.5×10-10
Max. throughput ※1 N2 (sccm) 2715
Startup time (min)  9-12
Shutdown time (min) 9-13
Max. backing pressure (Pa / Torr) 300/2.3
Recommended backing
vacuum pump
(L/min) 500
Amount of lubrication
oil required
(mL) 260
Position Vertical(±10℃)
Weight (kg) 50
Comtroller TC1003

*1 : When using a backing vacuum pump of 1000L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


VG200 φ300 20 392 330
CF200 φ253 25 407 345
ISO-B200 φ285 16 392 330
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  • Reprinting prohibited without permission. Contents are subject to change without notice.\

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC1003
Input Voltage (ACV) 200-230(±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 1600
Rated Output Frequency (Hz) 400
Weight (kg) 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction, Serial
communication instruction) : 1 copy