Products

TG203

  • TG203

■Corrosive resistant type for corrosive gases.

■Durable structure for air inrush.

■Sturdy, resists external impacts.

■Serial communication
 ※RS232C Serial interface

■Conforms to recognized safety standard
 NRTL / SEMI-S2 / CE

Application

■Semiconductor production

■Electronics gun exhaust, ionization source exhaust

■FPD manufacturing

■Surface treatment, surface modification

■Manufacture of various electronic components

■Lamp production, optical components production

■Accelerating device, radiation facility, nuclear fusion research

■Heat treatment

■Research and development
 *TG-F, TG-M and TGkine series is available for clean processes.


Specifications

Inlet flange VG100
CF100
ISO-R100
Volume flow rate N2 (L/s) 200
N2
(with protective
screen) (L/s)
140
H2 (L/s) 150
Max. compression
ratio
N2 1×108
H2 4×103
Base pressure  VG・ISO-B /
CF (Pa)
<1×10-6
< 1×10-7
VG・ISO-B /
CF (Torr)
<7.5×10-9
< 7.5×10-10
Max. throughput ※1 N2 (sccm) 543
Startup time (min)  4-6
Shutdown time (min) 4-6
Max. backing pressure (Pa / Torr) 550/4.1
Recommended backing
vacuum pump
(L/min) 80
Amount of lubrication
oil required
(mL) 70
Position Vertical(±10℃)
Weight (kg) 11
Comtroller TC203

*1 : When using a backing vacuum pump of 160L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D E
VG100 φ185 15 264 238
CF100 φ152 21 264 238
ISO-R100 φ130 12 262 236
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC203
Input Voltage (ACV) 100-110 (±10%) / 200-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 610
Rated Output Frequency (Hz) 800
Weight (kg) 2.7
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Manual (Instruction, Serial communication
instruction) : 1 copy