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TG203
■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
| Inlet flange | VG100 CF100 ISO-R100 |
|
| Volume flow rate | N2 (L/s) | 200 |
| N2 (with protective screen) (L/s) |
140 | |
| H2 (L/s) | 150 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 4×103 | |
| Base pressure | VG・ISO-B / CF (Pa) |
<1×10-6 < 1×10-7 |
| VG・ISO-B / CF (Torr) |
<7.5×10-9 < 7.5×10-10 |
|
| Max. throughput ※1 | N2 (sccm) | 543 |
| Startup time | (min) | 4-6 |
| Shutdown time | (min) | 4-6 |
| Max. backing pressure | (Pa / Torr) | 550/4.1 |
| Recommended backing vacuum pump |
(L/min) | 80 |
| Amount of lubrication oil required |
(mL) | 70 |
| Position | Vertical（±10℃） | |
| Weight | (kg) | 11 |
| Comtroller | TC203 | |
*1 : When using a backing vacuum pump of 160L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| A | B | C | D | E |
| VG100 | φ185 | 15 | 264 | 238 |
| CF100 | φ152 | 21 | 264 | 238 |
| ISO-R100 | φ130 | 12 | 262 | 236 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC203 |
| Input Voltage (ACV) | 100-110 (±10%) / 200-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 610 |
| Rated Output Frequency (Hz) | 800 |
| Weight (kg) | 2.7 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Manual (Instruction, Serial communication instruction) : 1 copy |