Products

TGkine3800M/TGkine4200M

  • TGkine3800M/TGkine4200M

- Integrated controller and power supply

- Energy saving

- Compact

- IP54 Standard

- Multiple interface options

- Conformed to International Standards: 

  CE / NRTL / SEMI-S2

Application

  • Solar cell manufacturing
  • Glass, optics coating
  • Film coating
  • Surface treatment, surface modification
  • LCD manufacturing
  • Semiconductor manufacturing
  • Accelerator, Space simulator

Specifications

Model※1
TGkine3800M
TGkine4200M
Inlet flange
ISO-B320
VG300
VG350
Outlet flange
KF40/KF50
Volume flow rate
N2 (L/s)
3600
4200
N2 
(with protective screen;
L/s)
3400
4000
H2 (L/s)
2700
Max. throughput※2、※3
N2 (sccm)
2800
Ar (sccm)
1400
Max. compression ratio
N2
>2.0×108
H2
2000
Base pressure※4
(Pa)
<5×10-7
Max. backing pressure※5
(Pa)
160
Startup time
(min)
≦12
Shutdown time
(min)
≦14
Input voltage
 (V)
AC200-240V
phase
Single
frequency
(Hz)
50/60
current
(A)
Max. 5.9
power
(kVA)
Max. 1.0
Weight
(kg)
80
75
  • *1 : Please contact Osaka Vacuum for the specific model information.
    *2 : 1 Pa・L/s(25℃) = 0.543 sccm (0℃, 1 atm)
    *3 : Effective volume flow rate at Outlet port: 5000 L/min.
    *4 : Pressure attained after 48 hours of bake-out.
    *5 : Max. foreline pressure in which the pump can continue to run without damage.

Drawing of outside dimensions

Drawing of outside dimensions


  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.