Products

TGkine1700M/TGkine2200M

  • TGkine1700M/TGkine2200M

- Integrated controller and power supply

- Energy saving

- Compact

- IP54 Standard

- Multiple interface options

- Conformed to International Standards: 

  CE / NRTL / SEMI-S2

Application

  • Solar cell manufacturing
  • Glass, optics coating
  • Film coating
  • Surface treatment, surface modification
  • LCD manufacturing
  • Semiconductor manufacturing
  • Accelerator, Space simulator

Specifications

Model※1 TGkine1700M TGkine2200M
Inlet flange ISO-B200
VG200
ISO-B250
VG250
Outlet flange※2 KF40/KF50
Volume flow rate N2 (L/s) 1650 2200
N2
(with protective screen; L/s)
1570 2100
H2 (L/s) 1550 1800
Max. throughput※3、※4 N2 (sccm) 4400 5000
Ar (sccm) 2600
Max. compression ratio N2 >2×108
H2 3×103
   Base pressure※5 (Pa) <2×10-7
(Torr) <1.5×10-9
   Max. backing pressure※6 (Pa) 220
(Torr) 1.65
Startup time (min) ≦10
Shutdown time (min) ≦10
Input voltage  (V) AC200-240V
phase Single phase
frequency (Hz) 50/60
current (A) Max. 5.3
power (kVA) Max. 0.9
Weight (kg) 65 62

*1 : Please contact Osaka Vacuum for the specific model information.

*2:Specifications may vary depending upon the model

*3 : 1 Pa・L/s(25℃) = 0.543 sccm (0℃, 1 atm)

*4 : Effective volume flow rate at Outlet port: 5000 L/min.

*5 : Pressure attained after 48 hours of bake-out.

*6 : Max. foreline pressure in which the pump can continue to run without damage.

Drawing of outside dimensions

Drawing of outside dimensions


Inlet flange A B
ISO-B250 348.5 325
VG250 343.5 320
  • Outlet flange KF50 is available.
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve

Reprinting prohibited without permission. Contents are subject to change without notice.