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- Turbo Molecular Pumps
- Ultra High Vacuum Type TG-MU Series
Ultra High Vacuum Type TG-MU Series
For ALL UHV Applications
- The TG-MU Series is designed to efficiently evacuate light gases from High Vacuum down to Ultra High Vacuum region by reducing the materials' outgassing and improving the efficiency of the Hydrogen compression.
- Ultimate Vacuum can be realized 10-9 Pa order ( in the 10-11 Torr) region within a short bake-out period.
Application
- Analytical instruments, surface Analysis and UHV R＆Ds.
- UHV Semiconductor thin film process and MEMS R＆Ds
- Energy Research, Accelerators, Nuclear fusion , etc.
Specifications
Drawing of outside dimensions
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Performance curve
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Controller
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