Products

Ultra High Vacuum Type TG-MU Series

  • Ultra High Vacuum Type TG-MU Series
  • Ultra High Vacuum Type TG-MU Series

■ For ALL UHV Applications

The TG-MU Series is designed to efficiently evacuate light gases from High Vacuum down to Ultra High Vacuum region by reducing the materials' out gassing and improving the efficiency of the Hydrogen compression.
Ultimate Vacuum can be realized 10-9 Pa order ( in the 10-11 Torr) region within a short bake - out period.

Application

- Analytical instruments, surface Analysis and UHV R&Ds.

- UHV Semiconductor thin film process and MEMS R&Ds

- Energy Research, Accelerators, Nuclear fusion , etc.


Specifications

 
TG900MU
TG1300MU
Inlet flange
CF160
CF200
Volume flow rate
N2 (L/s)
900
1300
N2
(with protective
screen) (L/s)
860
1230
H2 (L/s)
1050
1200
Max. compression ratio
N2
1×108
H2
6.0×104
Base pressure
(Pa/Torr)
< 1×10-8/< 7.5×10-11
Max. throughput※1 
N2(sccm)
3000
Startup time (min)
4-5
Shutdown time (min)
4-5
Max. backing pressure
(Pa/Torr)
500/3.8
Recommended backing vacuum 
pump (L/min)
≧250
Weight (kg)
42
Controller
TC010MA
  • *1 : In case of the backing vacuum pump of 1000L/min.

  • *2 : Dimension is same as standard.

Drawing of outside dimensions

Drawing of outside dimensions


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Performance curve

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Controller

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