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TG1400F
■ Any orientation
■ Compact size
■ Energy-saving
■ Quick start up
■ Quick shut down with gas vent
■ Durable structure for air inrush
■ Serial communication
※RS232C Serial interface
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Inlet flange | VG200 ISO-B200 CF200 |
|
| Volume flow rate | N2 (L/s) | 1400 |
| N2 (with protective screen) (L/s) |
1300 | |
| H2 (L/s) | 750 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 4.3×103 | |
| Base pressure | (Pa) (Torr) |
<1×10-6 <7.5×10-9 |
| Max. throughput ※1 | (sccm) | 450 |
| Startup time | (min) | 5.5-7 |
| Shutdown time | (min) | 15-18 |
| Max. backing pressure | (Pa/Torr) | 330/2.5 |
| Recommended backing vacuum pump |
(L/min) | ≧250 |
| Position | Any orientation | |
| Weight | VG・ISO-B/CF(kg) | 29/30 |
| Controller | TC1103 | |
*1 : When using a backing vacuum pump of 500L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
-
A B C D VG200 φ300 16 272 CF200 φ253 25 319 ISO-B200 φ285 16 300
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC1103 |
| Input Voltage (ACV) | 200-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 810 |
| Rated Output Frequency (Hz) | 560 |
| Weight (kg) | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
| TMP | TG1400F |