Products

TG1400F

  • TG1400F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush 

■ Serial communication
  ※RS232C Serial interface

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Inlet flange VG200
ISO-B200
CF200
Volume flow rate N2 (L/s) 1400
N2
(with protective screen)
(L/s)
1300
H2 (L/s) 750
Max. compression
ratio 
N2 1×108
H2 4.3×103
Base pressure (Pa)
(Torr)
<1×10-6
<7.5×10-9
Max. throughput ※1 (sccm) 450
Startup time (min)  5.5-7
Shutdown time (min)  15-18
Max. backing pressure (Pa/Torr) 330/2.5
Recommended backing
vacuum pump
(L/min) ≧250
Position Any orientation
Weight VG・ISO-B/CF(kg)  29/30
Controller TC1103

*1 : When using a backing vacuum pump of 500L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


  • A B C D
    VG200 φ300 16 272
    CF200 φ253 25 319
    ISO-B200 φ285 16 300
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC1103
Input Voltage (ACV) 200-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 810
Rated Output Frequency (Hz) 560
Weight (kg) 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction, Serial
communication instruction): 1 copy
TMP TG1400F