Products

TG1100F

  • TG1100F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush 

■ Serial communication
  ※RS232C Serial interface

■ Certificated safety standard NRTL / SEMI-S2 / CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Model
TG1100F
TG1100F*A*-60
TG1100F*W*
Inlet flange VG200
ISO-B200
CF200
Volume flow
rate
N2 (L/s) 1100
N2
(with protective
screen) (L/s)
1000
H2 (L/s) 720
Max. compression
ratio
N2 1×108
H2 1×104
Base pressure (Pa/Torr) <1×10-6/<7.5×10-9
Max.
throughput ※1※2
(sccm) 330 860
Startup time※2 (min)  7-9 5.5-7
Shutdown time ※2 (min)  27-32 12-15
Max. backing
pressure
(Pa/Torr) 330/2.5
Recommended
backing vacuum
pump
(L/min) ≧250
Position Any orentation
Weight VG・ISO-R/CF(kg)  28/27
Controller TC1104 TC1103※3

*1 : When using a backing vacuum pump of 500L/min.
*2 : Differs according to the power supply model.(standard:TC1104)
*3 : The air cooling fan must be replaced if air-cooled.(TG1100F***-60)

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D
VG200 φ300 16 281
CF200 φ253 25 306
ISO-B200 φ285 16 281
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC1104
TC1103
Input Voltage (ACV) 100-110 (±10%)
200-230 (±10%)
200-230 (±10%)
Input Frequency (Hz) 50/60 50/60
Input Phases Single Single
Input Power (VA) 610 810
Rated Output
Frequency (Hz)
560 560
Weight (kg) 2.7 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Manual (Instruction,
Serial communication
instruction): 1 copy
-Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction,
Serial communication
instruction): 1 copy
TMP TG800F TG800F*A*-60
TG800F*W*