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Products
TG1100F
■ Any orientation
■ Compact size
■ Energy-saving
■ Quick start up
■ Quick shut down with gas vent
■ Durable structure for air inrush
■ Serial communication
※RS232C Serial interface
■ Certificated safety standard NRTL / SEMI-S2 / CE
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Model |
TG1100F |
TG1100F*A*-60 TG1100F*W* |
|
| Inlet flange | VG200 ISO-B200 CF200 |
||
| Volume flow rate |
N2 (L/s) | 1100 | |
| N2 (with protective screen) (L/s) |
1000 | ||
| H2 (L/s) | 720 | ||
| Max. compression ratio |
N2 | 1×108 | |
| H2 | 1×104 | ||
| Base pressure | (Pa/Torr) | <1×10-6/<7.5×10-9 | |
| Max. throughput ※1※2 |
(sccm) | 330 | 860 |
| Startup time※2 | (min) | 7-9 | 5.5-7 |
| Shutdown time ※2 | (min) | 27-32 | 12-15 |
| Max. backing pressure |
(Pa/Torr) | 330/2.5 | |
| Recommended backing vacuum pump |
(L/min) | ≧250 | |
| Position | Any orentation | ||
| Weight | VG・ISO-R/CF(kg) | 28/27 | |
| Controller | TC1104 | TC1103※3 | |
*1 : When using a backing vacuum pump of 500L/min.
*2 : Differs according to the power supply model.(standard:TC1104)
*3 : The air cooling fan must be replaced if air-cooled.(TG1100F***-60)
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| A | B | C | D |
| VG200 | φ300 | 16 | 281 |
| CF200 | φ253 | 25 | 306 |
| ISO-B200 | φ285 | 16 | 281 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model |
TC1104 |
TC1103 |
| Input Voltage (ACV) | 100-110 (±10%) 200-230 (±10%) |
200-230 (±10%) |
| Input Frequency (Hz) | 50/60 | 50/60 |
| Input Phases | Single | Single |
| Input Power (VA) | 610 | 810 |
| Rated Output Frequency (Hz) |
560 | 560 |
| Weight (kg) | 2.7 | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
-Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
| TMP | TG800F | TG800F*A*-60 TG800F*W* |