Products

TG450F

  • TG450F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush 

■ Serial communication
  ※RS232C Serial interface

■ Certificated safety standard NRTL / SEMI-S2 / CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Inlet flange

VG150
ISO-B160
CF160

Volume flow rate N2 (L/s) 450
N2 (with protective screen)
(L/s)
430
H2 (L/s) 240
Max. compression ratio N2 1×108
H2 2×103
Base pressure (Pa)
(Torr)
<1×10-6
<7.5×10-9
Max. throughput※1 (sccm) 500
Startup time (min)  2-2.5
Shutdown time (min)  5-6.5
Max. backing pressure (Pa/Torr) 260/2
Recommended backing
vacuum pump
(L/min) ≧80
Position Any orientation
Weight VG・ISO-R/CF (kg)  7/10
Controller TC353

*1 : When using a backing vacuum pump of 160L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

 

Drawing of outside dimensions

Drawing of outside dimensions


A B C D
VG150 φ235 16 190
CF160 φ203 22 190
ISO-B160 φ225 16 190
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC353
Input Voltage (ACV) 100-110 (±10%)
200-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 610
Rated Output Frequency (Hz) 750
Weight (kg) 2.7
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Manual (Instruction, Serial
communication instruction): 1 copy
TMP TG450F