Products

TG240F

  • TG240F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick shut down with gas vent

■ Durable structure for air inrush

■ Built-in controller type

■ High compression ratio

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Inlet flange CF100/ISO-R100
Volume flow rate N2 (L/s) 240
N2 (with protective screen)
(L/s)
230
H2 (L/s) 160
Max. compression ratio  N2 1×108
H2 4×104
Base pressure  ISO-R (Pa/Torr) <1×10-6/<7.5×10-9
CF (Pa/Torr) <5×10-7/<3.8×10-9
Max. throughput ※1 N2 (sccm) 70
Startup time (min)  5.5-6
Max. backing pressure (Pa/Torr) 700/5.3
Recommended backing
vacuum pump
(L/min) ≧80
Position Any orientation
Weight ISO-R/CF(kg)  7.3/10.5
Controller TC245 (On-board)※2
Input Voltage DC24V
Max. Input Power 75W
  • *1 : Allowable maximum flow rate at an auxiliary pump capacity of 80 L/min.
    *2 : Optional separate type also available.
    (For details, notify our sales representative)
    [Corresponding gases]
       Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


*Necessary only if you select the separate type.

Controller model TC246
Input Voltage (ACV) 100-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 120
Rated Output Frequency (Hz) 800
Weight (kg) 2.4
Standard accessories -Input connector: 1
-Remote connector: 1
-Manual (Instruction): 1 copy
TMP TG240F-20