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TG240F
■ Any orientation
■ Compact size
■ Energy-saving
■ Quick shut down with gas vent
■ Durable structure for air inrush
■ Built-in controller type
■ High compression ratio
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Inlet flange | CF100/ISO-R100 | |
| Volume flow rate | N2 (L/s) | 240 |
| N2 (with protective screen) (L/s) |
230 | |
| H2 (L/s) | 160 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 4×104 | |
| Base pressure | ISO-R (Pa/Torr) | <1×10-6/<7.5×10-9 |
| CF (Pa/Torr) | <5×10-7/<3.8×10-9 | |
| Max. throughput ※1 | N2 (sccm) | 70 |
| Startup time | (min) | 5.5-6 |
| Max. backing pressure | (Pa/Torr) | 700/5.3 |
| Recommended backing vacuum pump |
(L/min) | ≧80 |
| Position | Any orientation | |
| Weight | ISO-R/CF(kg) | 7.3/10.5 |
| Controller | TC245 (On-board)※2 | |
| Input Voltage | DC24V | |
| Max. Input Power | 75W | |
- *1 : Allowable maximum flow rate at an auxiliary pump capacity of 80 L/min.
*2 : Optional separate type also available.
(For details, notify our sales representative)
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
*Necessary only if you select the separate type.
| Controller model | TC246 |
| Input Voltage (ACV) | 100-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 120 |
| Rated Output Frequency (Hz) | 800 |
| Weight (kg) | 2.4 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Manual (Instruction): 1 copy |
| TMP | TG240F-20 |