Products

Energy-saving Dry Vacuum Pump ER100D/ER100DC

  • Energy-saving Dry Vacuum Pump ER100D/ER100DC

-ER100D/ER100DC are among the best in the class in energy efficiency as well as lightness and compactness.

Energy consumption at ultimate pressure: 400W
Footprint: 0.11m2
Weight: 60kg


-Two types are available for your needs.

ER100D: for light load, non-corrosive gas pumping
ER100DC: employs anti-corrosive materials, for corrosive gas pumping

Application

- Clean exhaust
- Sputtering system
- Backing vacuum pump for TMP
- Load-lock and transfer chamber
- Small laboratory system
- Small furnace
- Analysis devices
- Ion source, EB-gun


Specifications

Model ER100D/ER100DC
Volume flow rate (L/min) 1670
Base pressure (Pa) 5.0
Energy consumption at ultimate pressure (W) 400
Power supply Voltage (V) 200-220
Frequency (Hz) 50/60
Phase Three phase
Power capability (kVA) 3.2
N2 gas purge throughput (Pa・m3/s) 17-20
Cooling system Water cooled
Required flow rate (L/min) 1.5-3.0
Required temperature (℃) Max. 30
Weight (㎏) 60

[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve

Reprinting prohibited without permission. Contents are subject to change without notice.