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Products
- Osaka Vacuum，Ltd. Top page
- Products
- Dry Vacuum Pumps
- Energy-saving Dry Vacuum Pump ER100D/ER100DC
Energy-saving Dry Vacuum Pump ER100D/ER100DC
-ER100D/ER100DC are among the best in the class in energy efficiency as well as lightness and compactness.
Energy consumption at ultimate pressure: 400W
Footprint: 0.11m2
Weight: 60kg
-Two types are available for your needs.
ER100D: for light load, non-corrosive gas pumping
ER100DC: employs anti-corrosive materials, for corrosive gas pumping
Application
- Clean exhaust
- Sputtering system
- Backing vacuum pump for TMP
- Load-lock and transfer chamber
- Small laboratory system
- Small furnace
- Analysis devices
- Ion source, EB-gun
Specifications
| Model | ER100D/ER100DC | |
| Volume flow rate (L/min) | 1670 | |
| Base pressure (Pa) | 5.0 | |
| Energy consumption at ultimate pressure (W) | 400 | |
| Power supply | Voltage (V) | 200-220 |
| Frequency (Hz) | 50/60 | |
| Phase | Three phase | |
| Power capability (kVA) | 3.2 | |
| N2 gas purge throughput （Pa・m3/s） | 17-20 | |
| Cooling system | Water cooled | |
| Required flow rate (L/min) | 1.5-3.0 | |
| Required temperature (℃) | Max. 30 | |
| Weight (㎏) | 60 | |
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.