Products

TG50F

  • TG50F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush

■ Serial communication

 ※RS232C Serial interface

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Model TG50F
Inlet flange VG65/ISO-R63/CF63
Volume flow rate N2 (L/s) 51
N2 (with protective
screen) (L/s)
49
H2 (L/s) 12
Max. compression ratio N2 1.4×107
H2 5×102
Base pressure VG・ISO-R/CF (Pa) <3×10-6
VG・ISO-R/CF (Torr) <2.3×10-8
Max. throughput※1 N2 (sccm) 80
Startup time (min)  1-1.5
Shutdown time (min) 1-1.5
Max. backing pressure (Pa/Torr) 1330/10
Recommended backing vacuum pump (L/min) ≧50
Position Any orientation
Weight VG・ISO-R/CF(kg) 4.2/6
Controller TC64

*1 : When using a backing vacuum pump of 100L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D
VG65 φ145 14 147
CF63 φ114 18 182
ISO-R63 φ95 12 168

Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve

Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC64
Input Voltage (ACV)
100-110 (±10%) / 200-230 (±10%)
Input Frequency (Hz)
50/60
Input Phases
Single
Input Power (VA)
220
Rated Output Frequency (Hz)
800
Weight (kg)
2.7
Standard accessories
  • -Input connector: 1
  • -Remote connector: 1
  • -Serial communication connector: 1
  • -Manual (Instruction, Serial communication
    instruction): 1copy