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TG50F
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
※RS232C Serial interface
Application
- Semiconductor production
- Electronics gun exhaust, ionization source exhaust
- FPD manufacturing
- Surface treatment, surface modification
- Manufacture of various electronic components
- Analysis, testing equipment
- Lamp production, optical components production
- Accelerating device, radiation facility, nuclear fusion research
- Heat treatment
- Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Model | TG50F | |
| Inlet flange | VG65/ISO-R63/CF63 | |
| Volume flow rate | N2 (L/s) | 51 |
| N2 (with protective screen) (L/s) |
49 | |
| H2 (L/s) | 12 | |
| Max. compression ratio | N2 | 1.4×107 |
| H2 | 5×102 | |
| Base pressure | VG・ISO-R/CF (Pa) | <3×10-6 |
| VG・ISO-R/CF (Torr) | <2.3×10-8 | |
| Max. throughput※1 | N2 (sccm) | 80 |
| Startup time | (min) | 1-1.5 |
| Shutdown time | (min) | 1-1.5 |
| Max. backing pressure | (Pa/Torr) | 1330/10 |
| Recommended backing vacuum pump | (L/min) | ≧50 |
| Position | Any orientation | |
| Weight | VG･ISO-R/CF(kg) | 4.2/6 |
| Controller | TC64 | |
*1 : When using a backing vacuum pump of 100L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
 |
 |
 |
 |
| VG65 | φ145 | 14 | 147 |
| CF63 | φ114 | 18 | 182 |
| ISO-R63 | φ95 | 12 | 168 |
Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model |
TC64
|
| Input Voltage (ACV) |
100-110 (±10%) / 200-230 (±10%)
|
| Input Frequency (Hz) |
50/60
|
| Input Phases |
Single
|
| Input Power (VA) |
220
|
| Rated Output Frequency (Hz) |
800
|
| Weight (kg) |
2.7
|
| Standard accessories |
|