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Air-cooled Dry Vacuum Pump FR060D
-Enable operation from atmospheric pressure.
Volume flow rate is 800L/min at atmospheric pressure.
-Enable handing water vapor.
Vapor tolerance is 500g/hr.
-Reducing evaculation time.
Consatnt volume flow rate 800L/min over wide pressure range to ultimate pressure.
- Small laboratory system
- Load-lock and transfter chamber
- Analysis devices
- Vacuum chuck
- Accelerating exhaust
- Encapsulation, sealing
- Ion source, EB-gun
- Sputter deposition
- Small furnace
- Backing vacuum pump for TMP
|Volume flow rate (L/min)||Maximum||1000|
|Base pressure (Pa)||Without gas ballast||1.0|
|With gas ballast||2.0|
|Max vapor tolerance※1 (g/hr)||500|
|Lubrication oil quantity (mL)||90|
|Power consumption (kW)||At base pressure||1.1|
|Power supply||Voltage (V)||200-240|
|Phase||Single / Three|
|Tolerable voltage fluctuation※2||±10％|
|Power capacity (kVA)||3.0|
|Electric current (A)||Single phase||11.1|
|Cooling system||Air cooling|
|Ambient temperature (℃)||5-40|
*1 It is an amount of the maximum processing when the gas ballast is “ON”.
*2 Contact Osaka Vacuum for special specification.
Drawing of outside dimensions