Products

Air-cooled Dry Vacuum Pump FR060D

  • Air-cooled Dry Vacuum Pump FR060D

-Enable operation from atmospheric pressure.
  Volume flow rate is 800L/min at atmospheric pressure.
-Enable handing water vapor.
  Vapor tolerance is 500g/hr.
-Reducing evaculation time.
  Consatnt volume flow rate 800L/min over wide pressure range to ultimate pressure.
-Air cooling.

Application

- Small laboratory system
- Load-lock and transfter chamber
- Analysis devices
- Vacuum chuck
- Accelerating exhaust
- Encapsulation, sealing
- Ion source, EB-gun
- Drying
- Sputter deposition
- Small furnace
- Backing vacuum pump for TMP


Specifications

Model FR060D
Volume flow rate (L/min) Maximum 1000
Constant 800
Base pressure (Pa) Without gas ballast 1.0
With gas ballast 2.0
Connection Inlet KF(NW)40
Outlet KF(NW)40
Max vapor tolerance※1 (g/hr) 500
Lubrication oil quantity (mL) 90
Power consumption (kW) At base pressure 1.1
Maximum 1.3
Power supply Voltage (V) 200-240
Frequency (Hz) 50/60
Phase Single / Three
Tolerable voltage fluctuation※2 ±10%
Power capacity (kVA) 3.0
Electric current (A) Single phase 11.1
Three phase 6.5
Cooling system Air cooling
Weight (kg) 75
Ambient temperature (℃) 5-40

*1 It is an amount of the maximum processing when the gas ballast is “ON”.
*2 Contact Osaka Vacuum for special specification.

Drawing of outside dimensions

Drawing of outside dimensions


  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.