| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG150 | φ235 | 16 | 449 | 430 |
| CF160 | φ203 | 22 | 449 | 430 |
| ISO-B160 | φ225 | 16 | 449 | 430 |
Ball Bearing Turbo Molecular Pumps
TS440/TS443
Helical Grooved Vacuum Pumps
Features
- All helical groove stage type rotor
- High gas throughput at medium to low vacuum
- Conformance to safety standards: NRTL / SEMI-S2 / CE
Application
- Semiconductor manufacturing
- Electron gun, Ion source
- Surface treatment, Surface modification
- Electronic components manufacturing
- Light bulb manufacturing, optical components manufacturing
- Accelerator, Radiation facility, Nuclear fusion research
- Vacuum furnaces
- Research and development
Specifications
Specifications
| Model | TS440 / TS443 | |
|---|---|---|
| Inlet | VG150 / CF160 / ISO-B160 | |
| Outlet | KF40 | |
| Volume flow rate | N₂ (L/s) | 440 |
| N₂ (with protective screen) (L/s) | 410 | |
| H₂ (L/s) | 320 | |
| Max. compression ratio | N₂ | 2×10⁶ |
| H₂ | 1×10³ | |
| Base pressure | Pa | <1×10⁻⁵ *³ |
| Torr | <7.5×10⁻⁸ *³ | |
| Max. throughput *1 *2 | N₂ (sccm) | 10860 |
| Startup time | min | 10～14 |
| Shutdown time | min | 23～28 |
| Max. backing pressure | Pa | 2000 |
| Torr | 15 | |
| Recommended backing vacuum pump | L/min | ≧500 |
| Mouting orientation | Vertical (±10°) | |
| Weight | kg | 60 |
| Controller model | TC443S | |
*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a 160L/min backing pump
*3: Pressure attained after 48 hours of bake-out.
Dimensions
* All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gus throughput】
【Volume flow rate】
* Sf: Volume flow rate of the backing pump
* Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC443S |
|---|---|
| Input Voltage | AC180-253V |
| Input Phases | Single |
| Input Frequency (Hz) | 50/60 |
| Rated Output Frequency (Hz) | 330 |
| Input Power (VA) | 2200 |
| Weight (kg) | 8.2 |
| Communication interface | Parallel I/O・RS232C |
| Standard accessories | ・Input connector: 1 ・Remote connector: 1 ・Serial communication connector: 1 ・Manual (Instruction, Serial communication instruction): 1 copy each |
