Magnetically Levitated Turbo Molecular Pumps
TGkineMI-B SERIES
Energy Efficient Heated Type Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit
Features
TGkineMI-B series heats itself and reduces condensation in processes with by-products. Osaka’s patented thermally insulated structure with a temperature management system (TMS) heats the pump up efficiently.
- Conventional heating to reduce deposition
Heat up both the target area and its surroundings.
・Heat escapes to the surrounding area/ heating is not so efficient.
・Undesired high temperature at the surrounding area. - Heating on TGkineMI-B series
In addition to the heating by an external heater, the pump also utilizes the heat generated by friction between the process gas and the pump walls to heat up the target area
・The heatinsulating structure enables high temperature at the target area with less heat from the external heater.
・The heatinsulating structure lowers the temperature at non-target area and reduces the rotor creep.
・The exhaust port is also heated and prevents by-product deposition there.
Application
- Etching tools in semiconductor, LCD, and MEMS manufacturing
- Vacuum processing tools that generate by-products
Specifications
Specifications
| Model※1 | TGkine 2200MI-B | TGkine 3300MI-B | TGkine 3400MI-B | TGkine 3800MI-B | TGkine 4200MI-B | |
|---|---|---|---|---|---|---|
| Inlet | ISO-B250 / VG250 | ISO-B320 / VG300 | VG350 | ISO-B320 / VG300 | VG350 | |
| Volume flow rate | N₂(L/s) | 2200 | 3300 | 3600 | 4200 | |
| N₂(with protective screen)(L/s) | 2100 | 3100 | 3400 | 4000 | ||
| Ｈ₂(L/s) | 1800 | 2700 | ||||
| Max. compression ratio | N₂ | ＞2×10⁸ | ＞1×10⁸ | ＞2×10⁸ | ||
| H₂ | ＞3×10³ | 2×10³ | ||||
| Base pressure | Pa | ＜2×10⁻⁷ | ＜5×10⁻⁷ | |||
| Torr | ＜1.5×10⁻⁹ | ＜3.8×10⁻⁹ | ||||
| Max. throughput※2 | N₂(sccm) | 5000 | 2500 | 2800 | ||
| Ar(sccm) | 3000 | 1800 | 2100 | |||
| Startup time | min | ≦10 | ≦11 | ≦12 | ||
| Shutdown time | min | ≦10 | ≦13 | ≦14 | ||
| Max. backing pressure | Pa | 100 | 110 | 100 | ||
| Torr | 0.75 | 0.82 | 0.75 | |||
| Recommended backing pump | L/min | ≧2000 | ||||
| Weight (kg) | 65 | ISO-B：74 VG：73 |
76 | ISO-B：89 VG：87 |
84 | |
※1：TGkine1700MI-B is also available upon request.
※2：When the pump is backed by a 5000 L/min backing pump
Dimensions
*Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Contact our sales representative for more information.
