Magnetically Levitated Turbo Molecular Pumps
TGkine2200M-B
Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit
Features
- Integrated controller and power supply
- Energy saving
- Compact
- IP54 Standard
- Multiple interface options
- Conformed to International Standards: CE / NRTL / SEMI-S2
Application
- Solar cell manufacturing
- Glass, optics coating
- Film coating
- Surface treatment, surface modification
- LCD manufacturing
- Semiconductor manufacturing
- Accelerator, Space simulator
Specifications
Specifications
| Model ※1 | TGkine2204M-B | TGkine2205M-B | |
|---|---|---|---|
| Inlet | ISO-B250/VG250 | ||
| Outlet ※2 | KF40 | KF50 | |
| Volume flow rate | N₂ (L/s) | 2200 | |
| N₂ (with protective screen) (L/s) | 2100 | ||
| H₂ (L/s) | 1800 | ||
| Max. compression ratio | N₂ | >2×10⁸ | |
| H₂ | 3×10³ | ||
| Base pressure ※5 | Pa | <2×10⁻⁷ | |
| Torr | <1.5×10⁻⁹ | ||
| Max. throughput ※3 ※4 | N₂ (sccm) | 4400 | 4400 |
| Ar (sccm) | 2600 | 2600 | |
| Startup time | min | ≦10 | ≦10 |
| Shutdown time | min | ≦10 | ≦10 |
| Max. backing pressure ※6 | Pa | 220 | |
| Torr | 1.65 | ||
| Recommended backing vacuum pump | L/min | ≧2000 | |
| Mouting orientation | Any | ||
| Weight | kg | 62 | |
| Input Voltage | AC200-240V | AC200-240V | |
| Input Phases | Single | ||
| Input Frequency | Hz | 50/60 | |
| Input power | VA | Max. 900 | |
| Electric current | A | Max. 5.3 | |
※1：Please contact us for the specific model name.
※2：Specifictions may vary depending upon the model.
※3：1Pa・L/s (25 ℃) = 0.543 sccm (0℃, 1 atm)
※4：When the pump is backed by a 5000 L/min backing pump.
※5：Pressure attained after 48 hours of bake -out.
※6：Max. foreline pressure in which the pump can continue to run without triggering the fail-safe acceleration-shutdown feature.
Dimensions
*Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gas throughput】
【Volume flow rate】
*Reprinting prohibited without permission. Contents are subject to change without notice.
