| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ | Ⓕ |
| CF63 | φ114 | 18 | 170 | 76 | 141 |
| ISO-R63 | φ95 | 12 | 144.5 | 50.5 | 115.5 |
Ball Bearing Turbo Molecular Pumps
TG60F
Grease-lubricated ball bearing type Turbo Molecular Pumps
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shutdown with gas vent
- Durable structure for air inrush
- High compression ratio
- Integrated controller type: TG60F,
Rack-mounted type: TG60F-20 - Certificated safety standard NRTL/SEMI-S2/CE (for TG60F-20)
Application
- Semiconductor production
- FPD manufacturing
- Manufacture of various electronic components
- Analysis, testing equipment
- Research and development
Specifications
Specifications
| Model | TG60F | TG60F-20 | |
|---|---|---|---|
| Inlet | ISO-R63 / CF63 / (KF40) ※3 | ||
| Outlet | KF16 | KF16 | |
| Volume flow rate | N₂ (L/s) | 60 | |
| N₂ (with protective screen) (L/s) | 55 | ||
| H₂ (L/s) | 22 | ||
| Max. compression ratio | N₂ | 2×10⁷ | |
| H₂ | 3×10³ | ||
| Base pressure | Pa | <5×10⁻⁶ (ISO-R) / <1×10⁻⁶ (CF) | |
| Torr | <3.8×10⁻⁸ (ISO-R) / <7.5×10⁻⁹ (CF) | ||
| Max. throughput ※1 | N₂ (sccm) | 10 (Natural air cooling) / 20 (Forced air cooling) | 10 (Natural air cooling) / 20 (Forced air cooling) |
| Startup time | min | 1.5～2 | 1.5～2 |
| Shutdown time | min | 15～25 | 15～25 |
| Max. backing pressure | Pa | 800 | |
| Torr | 6 | ||
| Recommended backing vacuum pump | L/min | ≧ 25 | |
| Mouting orientation | Any orientation | ||
| Weight | kg | 【TG60F】3.4 (ISO-R) / 5.4 (CF) 【TG60F-20】3 (ISO-R) / 5 (CF) | |
| Controller model ※2 | TC65 | TC66 | |
※1: This maximum throughput is based on a 25 L/min backing pump.
※2: Two types of controllers are available: the onboard type (TC65) and the rack-mounted type (TC66).
※3: Please contact us for models with KF40 inlet flange.
[Ambient Temperature]
The base pressure is only guaranteed at an ambient temperature ranging from 10 to 23°C. The operating temperature range is 8 to 38°C.
[Applicable Gases]
Some gases may damage the bearing grease or internal components. Contact us about the types of gases that can be used.
Dimensions
※ Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
※ The drawing above is for the TG60F with an onboard controller. The TG60F-20 does not have an onboard controller and instead has a rack-mounted controller.
※ Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gus throughput】
【Volume flow rate】
※ Sf: Volume flow rate of the backing pump
※ Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC65 | TC66 |
|---|---|---|
| Input Voltage | DC 24 V | AC100-230V |
| Input Phases | － | Single |
| Input Frequency (Hz) | 50 / 60 | 50/60 |
| Rated Output Frequency (Hz) | 1150 | 1150 |
| Input Power (VA) | 120 (W) | 240 |
| Weight (kg) | － | 2.4 |
| Communication interface | Parallel I/O・RS232C | Parallel I/O・RS232C |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Manual(Instruction): 1 copy |
-Input connector: 1 -Remote connector: 1 -Manual(Instruction): 1 copy |
| Compatible pump models | TG60F | TG60F-20 |
