| Ⓐ | Ⓑ | Ⓒ | Ⓓ |
| VG100 | φ185 | 15 | 263 |
| CF100 | φ152 | 21 | 269 |
| ISO-B100 | φ165 | 12 | 260 |
Magnetically Levitated Turbo Molecular Pumps
TG390M
Magnetically Levitated Turbo Molecular Pump
Features
- Any orientation
- Compact size
- Energy-saving
- Quick starts and stops
- Maintenance call
- Vibration free
- Model coupling free
- Automatic calibration
- High throughput
- Rotational speed control
- Safety standards certification for NRTL SEMI-S2 CE
Application
- Semiconductor production
- Electronics gun exhaust, ionization source exhaust
- FPD manufacturing
- Surface treatment, surface modification
- Manufacture of various electronic components
- Analysis, testing equipment
- Lamp production, optical components production
- Accelerating device, radiation facility, nuclear fusion research
- Heat treatment
- Research and development
Specifications
Specifications
| Model | TG390M | |
|---|---|---|
| Inlet | VG100/ISO-B100/CF100 | |
| Outlet | KF25 | |
| Volume flow rate | N₂ (L/s) | 340 |
| N₂ (with protective screen) (L/s) | 320 | |
| H₂ (L/s) | 290 | |
| Max. compression ratio | N₂ | 1×10⁸ |
| H₂ | 4.5×10³ | |
| Base pressure | Pa | <1×10⁻⁶ (VG・ISO-B) / <1×10⁻⁷ (CF) |
| Torr | <7.5×10⁻⁹ (VG・ISO-B) / <7.5×10⁻¹⁰ (CF) | |
| Max. throughput ※1 | N₂ (sccm) | 2000 |
| Ar (sccm) | 700 | |
| Startup time | min | 2～3 |
| Shutdown time | min | 4～5 |
| Max. backing pressure | Pa | 400 |
| Torr | 3.0 | |
| Recommended backing vacuum pump | L/min | ≧160 |
| Mouting orientation | Any | |
| Weight | kg | 14 (VG・ISO-B) / 17 (CF・Corrosion Resistant type) |
| Controller model | TC010MB | |
※1: When using a backing vacuum pump of 320L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for the air cooling type and 10-40℃ for the water cooling type. The maximum temperature for the cooling water, which ensures the ultimate pressure is 30℃, and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
*Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gas throughput】
【Volume flow rate】
*Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC010MB |
|---|---|
| Input Voltage | AC200-240V (±10%) |
| Input Phases | Single |
| Input Frequency (Hz) | 50/60 |
| Rated Output Frequency (Hz) | 680 |
| Input Power (VA) | 700 |
| Weight (kg) | 11 |
| Communication interface | Remote・RS232C |
| Standard accessories | ・Remote connector：1 pc. ・Input cable (5m)：1 pc. ・Instruction manual (controller, serial communication)：1 copy for each. |
