| Ⓐ | Ⓑ | Ⓒ | Ⓓ |
| VG100 | φ185 | 15 | 200 |
| CF100 | φ152 | 21 | 220 |
| ISO-R100 | φ130 | 12 | 200 |
Ball Bearing Turbo Molecular Pumps
TG220F
Grease-lubricated ball bearing type Turbo Molecular Pumps
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shutdown with gas vent
- Durable structure for air inrush
※ Air inrush test (continual 400 times) - Serial communication
- Certificated safety standard: NRTL / SEMI-S2 / CE
Application
- Semiconductor production
- Electronics gun exhaust, ionization source exhaust
- FPD manufacturing
- Surface treatment, surface modification
- Manufacture of various electronic components
- Analysis, testing equipment
- Lamp production, optical components production
- Accelerating device, radiation facility, nuclear fusion research
- Heat treatment
- Research and development
※ If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
Specifications
| Model | TG220F | |
|---|---|---|
| Inlet | VG100 / ISO-R100 / CF100 | |
| Outlet | KF25 | |
| Volume flow rate | N₂ (L/s) | 220 |
| N₂ (with protective screen) (L/s) | 210 | |
| H₂ (L/s) | 100 | |
| Max. compression ratio | N₂ | 1×10⁸ |
| H₂ | 4×10² | |
| Base pressure | Pa | <1×10⁻⁶ |
| Torr | <7.5×10⁻⁹ | |
| Max. throughput ※1 | N₂ (sccm) | 400 |
| Startup time | min | 1～1.2 |
| Shutdown time | min | 2.5～3.5 |
| Max. backing pressure | Pa | 260 |
| Torr | 2 | |
| Recommended backing vacuum pump | L/min | ≧80 |
| Mouting orientation | Any orientation | |
| Weight | kg | 5.5 (VG・ISO-R) / 8 (CF) |
| Controller model | TC223A | |
※1: This maximum throughput is based on a 160 L/min backing pump.
[Ambient Temperature]
The base pressure is guaranteed only at ambient temperatures ranging from 10 to 23°C. The operating temperature range is 10 to 32°C for the air-cooling models and 10 to 40°C for the water-cooling models. The base pressure is only guaranteed at a water temperature of 30°C or below. The water temperature range is 10 to 35°C.
[Applicable Gases]
Some gases may damage the bearing grease or internal components. Contact us about the types of gases that can be used.
Dimensions
※ Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
※ Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gus throughput】
【Volume flow rate】
※ Sf: Volume flow rate of the backing pump
※ Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC223A |
|---|---|
| Input Voltage | AC 100-110 V/AC 200-230 V |
| Input Phases | Single |
| Input Frequency (Hz) | 50/60 |
| Rated Output Frequency (Hz) | 800 |
| Input Power (VA) | 590 |
| Weight (kg) | 2.7 |
| Communication interface | Parallel I/O・RS232C |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Manual (Instruction, Serial communication instruction): 1copy |
