| Ⓐ | Ⓑ | Ⓒ | Ⓓ |
| VG200 | φ300 | 16 | 324 |
| CF200 | φ253 | 25 | 385 |
| ISO-B200 | φ285 | 16 | 359 |
Magnetically Levitated Turbo Molecular Pumps
TG1300M
Magnetically Levitated Turbo Molecular Pump
Features
- Any orientation
- Compact size
- Energy-saving
- Quick starts and stops
- Maintenance call
- Vibration free
- Model coupling free
- Automatic calibration
- High throughput
- Rotational speed control
- Safety standards certification for NRTL SEMI-S2 CE
Application
- Semiconductor production
- Electronics gun exhaust, ionization source exhaust
- FPD manufacturing
- Surface treatment, surface modification
- Manufacture of various electronic components
- Analysis, testing equipment
- Lamp production, optical components production
- Accelerating device, radiation facility, nuclear fusion research
- Heat treatment
- Research and development
Specifications
Specifications
| Model ※1 | TG1300M | |
|---|---|---|
| Inlet | VG200/ISO-B200/CF200 | |
| Outlet | KF40 | |
| Volume flow rate | N₂ (L/s) | 1300 |
| N₂ (with protective screen) (L/s) | 1230 | |
| H₂ (L/s) | 1200 | |
| Max. compression ratio | N₂ | 1×10⁸ |
| H₂ | 1.5×10⁴ | |
| Base pressure | Pa | <1×10⁻⁶ (VG・ISO-B) / <1×10⁻⁷ (CF) |
| Torr | <7.5×10⁻⁹ (VG・ISO-B) / <7.5×10⁻¹⁰ (CF) | |
| Max. throughput ※1 | N₂ (sccm) | 3000 |
| Ar (sccm) | 1500 | |
| Startup time | min | 4～5 |
| Shutdown time | min | 4～5 |
| Max. backing pressure | Pa | 500 |
| Torr | 3.8 | |
| Recommended backing vacuum pump | L/min | ≧250 |
| Mouting orientation | Any | |
| Weight | kg | 34 (VG・ISO-B) / 42 (CF・Corrosion Resistant type) |
| Controller model | TC010MB | |
※1: When using a backing vacuum pump of 1000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for the air-cooling type and 10-40℃ for the water-cooling type. The maximum temperature for the cooling water, which ensures the ultimate pressure, is 30℃, and the allowable temperature range is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
*Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
【Gas throughput】
【Volume flow rate】
*Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC010MB |
|---|---|
| Input Voltage | AC200-240V (±10%) |
| Input Phases | Single |
| Input Frequency (Hz) | 50/60 |
| Rated Output Frequency (Hz) | 560 |
| Input Power (VA) | 1200 |
| Weight (kg) | 11 |
| Communication interface | Remote・RS232C |
| Standard accessories | ・Remote connector：1 pc. ・Input cable (5m)：1 pc. ・Instruction manual (controller, serial communication)：1 copy for each. |
