Magnetically Levitated Turbo Molecular Pumps
TG-MI SERIES
Energy Efficient Heated Type Magnetically Levitated Turbo Molecular Pumps
Features
TG-MI series heats itself and reduces condensation in processes with by-products. Osaka’s patented thermally insulated structure with a temperature management system (TMS) heats the pump up efficiently.
- Conventional heating to reduce deposition
Heat up both the target area and its surroundings.
・Heat escapes to the surrounding area/ heating is not so efficient.
・Undesired high temperature at the surrounding area. - Heating on TG-MI series
In addition to the heating by an external heater, the pump also utilizes the heat generated by friction between the process gas and the pump walls to heat up the target area
・The heat-insulating structure enables high temperature at the target area with less heat from the external heater.
・The heat-insulating structure lowers the temperature at non-target area and reduces the rotor creep.
・The exhaust port is also heated and prevents by-product deposition there.
Application
- Etching tools in semiconductor, LCD, and MEMS manufacturing
- Vacuum processing tools that generate by-products
Specifications
Specifications
| Model | TG390MI | TG420MI | TG900MI | TG1300MI | TG2400MI | |
|---|---|---|---|---|---|---|
| Inlet | ISO-B100 / VG100 | ISO-B160 / VG150 | ISO-B160 / VG150 | ISO-B200 / VG200 | ISO-B250 / VG250 | |
| Outlet | KF25 | KF40 | ||||
| Volume flow rate | N₂(L/s) | 340 | 400 | 900 | 1300 | 2400 |
| N₂(with protective screen)(L/s) | 320 | 370 | 860 | 1230 | 2300 | |
| Ｈ₂(L/s) | 290 | 300 | 1050 | 1200 | 1100 | |
| Max. compression ratio | N₂ | 1×10⁸ | ||||
| H₂ | 4.5×10³ | 1.5×10⁴ | 8.3×10² | |||
| Base pressure | Pa | ＜1×10⁻⁶ | ||||
| Torr | ＜7.5×10⁻⁹ | |||||
| Max. throughput※1 | N₂(sccm) | 2000 | 3000 | |||
| Startup time | min | 2～3 | 4～5 | |||
| Shutdown time | min | 4～5 | ||||
| Max. backing pressure | Pa | 350 | 500 | 150 | ||
| Torr | 2.6 | 3.8 | 1.1 | |||
| Recommended backing pump | L/min | ≧160 | ≧250 | ≧500 | ||
| Weight (kg) | 18 | 42 | 56 | |||
| Controller model | TC010MBT | |||||
※1：This max throughput is based on a 320 L/min (TG390/420MI), 1000L/min (TG900/1300/2400MI) backing pump.
※2：The performance curves are identical to those of the standard model. Please refer to the standard model for each type.
Dimensions
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Performance curve
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Controller
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